Infrared detection element and method for fabricating the same and equipment for measuring temperature

TLDR: In this article, a thermopile type infrared detection element, specifically, a low-cost infrared detection elements which can measure temperature with a higher accuracy, is provided, which employs a silicon nitride film as a first structure layer (22) becoming the structure at a thin film part.

Abstract: [Issue] A thermopile type infrared detection element, specifically, a low-cost infrared detection element which can measure temperature with a higher accuracy. [Solution] The infrared detection element (1) which employs a silicon nitride film as a first structure layer (22) becoming the structure at a thin film part (4) is provided. Since the first structure (22) has an inner tensile stress unlike to a silicon oxide film, occurrence of flexure can e prevented. Furthermore, diodes D1 and D2 can be fabricated on a silicon substrate (2) utilizing the first structure layer (22) as an isolation band, and measurement error of a thermopile (12) can be suppressed by preventing variation in the shape thereof incident to variation of environment, thereby providing a high accuracy infrared detection element in which the cold junction temperature can be detected accurately by means of the diodes D1 and D2.