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Table I. Epitaxial thickness of PLD-KE, PLD-TH, and MBE at 100 °C and 150 °C. In the case of PLD-KE, the thickest samples – 270 nm at 100 °C and 410 nm at 150 °C – are still fully epitaxial.
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Journal Article
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DOI
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Kinetic-energy induced smoothening and delay of epitaxial breakdown in pulsed-laser deposition
[...]
Byungha Shin
1
,
Michael J. Aziz
1
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Institutions (1)
Harvard University
1
24 Aug 2007
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Physical Review B