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Patent

Micro-machined sensor, particularly for displacement

TLDR
In this paper, a micro-machined inductive sensor emits an alternating magnetic field in order to detect position and or movement of an object (O), which is capable of modifying the magnetic field, by means of a discontinuity (D,C).
Abstract
Micro-machined inductive sensor emits an alternating magnetic field in order to detect position and or movement of an object (O), which is capable of modifying the magnetic field, by means of a discontinuity (D,C). The sensor comprises a planar emitting coil (10), which radiates the alternating magnetic field and one or more planar receiving magnetic coils (11-14), arranged in such a manner as to capture a certain part of the radiating field and variations in the field caused by discontinuities in the object (O). The coils are machined on the common substrate by a selective photolithography process. In the areas where the emitter coil (10) is contiguous with the receiver coils (11-14) a shielding strip galvanically independent of the coils (10-14) is connected to a reference potential. The shielding strip is formed by deposition of a metal skin on the substrate.

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Patent

Inductive displacement detector

TL;DR: A detector for measuring relative position along a measurement path consisting of a passive, laminar electrical intermediate device extending along the measurement path, where the extent of the said intermediate device in an axis normal to the measurement axis varies along measurement axis as mentioned in this paper.
Patent

Man-machine interface having relative position sensor

TL;DR: In this article, a man-machine interface is provided for a domestic appliance in which remotely sensed buttons, slider bars, marker pucks and a knob are used, and the sensing coils are formed on a printed circuit board which is located behind a sealed surface.
Patent

Transducer vom Induktionstyp und elektronische Tastlehre

TL;DR: Transducer (160) and a Skalenspule (104) as mentioned in this paper were the first to demonstrate the relativen Versetzung andert of the Transducer in Ubereinstimmung.
Patent

Sensor for motor vehicle has reference sensor for recording and monitoring of variable disturbance of sensor and by recording variable disturbance of measuring signal of sensor, system is put in secure and given state

TL;DR: In this article, a sensor device has reference sensor for recording and monitoring of the variable disturbance of the sensor, the system is set in a secure and a given state, before the disturbance controls the measuring signal of the sensors.
References
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Patent

Miniature silicon accelerometer and method

TL;DR: In this article, a miniature accelerometer is fabricated using integrated circuit manufacturing and silicon micromachining techniques to form a closed loop, force balance sensor utilizing a silicon proofmass formed from and connected to a layer of silicon by a split flexure etched therein.