Patent
System and Method for Providing High-Range Capability with Closed-Loop Inertial Sensors
James A. Modugno,Todd A. Ell +1 more
TLDR
In this paper, an inertial sensing system with a proof mass providing a deflection signal in response to application of inertial force, where the proof mass has a physical deflection limit and a selected saturation limit set below the deflection constraint, is considered.Abstract:
An inertial sensing system including an inertial sensor having a proof mass providing a deflection signal in response to application of an inertial force, wherein the proof mass has a physical deflection limit and a selected saturation limit set below the deflection limit, elements for providing a closed-loop output in response to the deflection signal from the inertial sensor, wherein the closed-loop output is proportional to the inertial force until the saturation limit of the inertial sensor is reached, elements for providing an open-loop output in response to the deflection signal from the inertial sensor once the saturation limit is reached, and elements for summing the closed-loop output with the open-loop output when the saturation limit of the inertial sensor is reached, to provide a high-range output response for the system.read more
Citations
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Patent
Inertial angular sensor of balanced mems type and method for balancing such a sensor
TL;DR: In this paper, the authors proposed a method for balancing an inertial angular sensor with at least one load detector and at least two masses, which are suspended in a frame connected by suspension means to the support.
Patent
System, apparatus, and method for resonator and coriolis axis control in vibratory gyroscopes
TL;DR: In this article, a gyroscope control circuit can include a Q compensation circuit to compensate for variations in the sensitivity due to variations in resonator signal path quality factor (Q).
Patent
Quality Factor Estimation for Resonators
TL;DR: In this paper, the quality factor of a resonating body is determined in a manner that is not dependent on the transduction parameters of the MEMS device, without requiring the simultaneous use of the body.
Patent
Extended-range closed-loop accelerometer
Jens M Henrickson,Donny Rojo +1 more
TL;DR: In this paper, a microelectromechanical system (MEMS) accelerometer with extended operational capabilities beyond a closed-loop saturation is presented. But the acceleration measurement is performed using a hybrid acceleration measurement, which combines the closedloop feedback signal and the measured proof-mass position into a hybrid measurement.
Patent
Logo-combined screen unlocking method and device
TL;DR: In this paper, a Logo-combined screen unlocking method and device is presented, which comprises the following steps: when a terminal receives an unlocking signal, splitting a preset Logo into at least two click items which are used for a user to click, and displaying the click items on an unlocking interface; receiving the click operations of the click item by the user, and obtaining the click frequency and the click sequence of each current clicked item.
References
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PatentDOI
Single proof mass, 3 axis mems transducer
TL;DR: In this paper, a transducer is provided which comprises an unbalanced proof mass (51), and which is adapted to sense acceleration in at least two mutually orthogonal directions.
Patent
Force rebalancing for MEMS inertial sensors using time-varying voltages
TL;DR: In this article, the authors present a method to adjust rebalancing voltages applied to torquer electrodes to electrostatically null quadrature and/or Coriolis-related proof mass motion along a sense axis of the device.
Patent
Force rebalancing and parametric amplification of MEMS inertial sensors
TL;DR: In this paper, a method for measuring Coriolis forces using force rebalancing voltages and parametric gain amplification techniques is described. Butler et al. showed that force balancing voltages can be applied to some torquer electrodes for electrostatically nulling quadrature and/or Coriola-related proof mass motion along a sense axis of the device, and a pumping voltage at approximately twice the motor drive frequency of the proof masses along the sense axis for increasing scale factor.
Patent
Micromechanical inertial sensor having increased pickoff resonance damping
TL;DR: In this paper, a micromechanical inertial sensor is provided having a reduced pickoff Q, while maintaining a high motor Q. This sensor includes a pair of proof masses and aligned pickoff plates, each pickoff plate is spaced from the respective proof mass by a gap that varies in response to out-ofplane movement of the proof mass.
Patent
Micro-electromechanical system inertial sensor
Roman C. Gutierrez,Tony K. Tang +1 more
TL;DR: In this article, a micro-machined MEMS resonator gyroscope and accelerometer is fabricated from an epilayer semiconductor wafer to incorporate a substantially planar, H-shaped resonator mass suspended from a support plate by two opposed elongated springs that couple to the relatively short crossbar member of the H. The masses are harmonically oscillated relative to the support plate and a baseplate portion, and two orthogonal modes of the structure corresponding to the two nearly degenerate fundamental torsional modes thereof are used for sensing angular rate about one axis