Figure 6: Volume versus area data of individual blisters derived from 50×50 µm2 AFM scans of samples after 5 hours of exposure to the ion+neutral flux at Texposure=100 °C. (a) No pre/post-annealing; (b) 200 °C pre-anneal; (c) 300 °C pre-anneal; and (d) 250 °C post-anneal. “Ion-induced” and “thermal neutral” blisters are represented by filled and open circles, respectively. The reference curve from figure 2 is again reproduced.
...read more