Patent
Waveguide load having reflecting structure for diverting microwaves into absorbing fluid
Johnston Fox Lowell,John Dimeff +1 more
TLDR
In this article, a calorimetric load for very high microwave power at very high frequencies is formed by a metallic, cylindrical chamber into which the waveguide carrying the power opens.Abstract:
A calorimetric load for very high microwave power at very high frequencies is formed by a metallic, cylindrical chamber into which the wave-guide carrying the power opens. Inside the metallic cylinder is a coaxial dielectric cylinder, with a space between full of circulating wave-absorbing fluid such as water. The incoming wave may be in a higher-order mode. To make it disperse rapidly into the absorbing fluid, a conical reflector is located inside the dielectric cylinder to reflect the wave outward.read more
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Patent
Plasma Processing Apparatus
TL;DR: In this paper, a plasmas processing apparatus consisting of plural layers formed in stack one upon another on a semiconductor wafer placed on the sample holder located in the process chamber is etched with plasma generated by supplying high frequency power to the electrode disposed in a sample holder, and a power source for supplying power at different values to the ring-shaped electrode depending on the sorts of layers of the layer structure.
Patent
Dummy load for a microwave dryer
TL;DR: In this paper, a matched load for a microwave dryer having a microwave generator and a microwave applicator is presented, where the matched load includes a waveguide having opposed broad walls, opposed narrow walls, and an end wall defining the waveguide chamber.
Patent
Apparatus for plasma processing
TL;DR: In this paper, a plasma processing apparatus that generates a uniform plasma, thus allowing uniform processing of large-diameter wafers, is described, which includes a wafer mounting table, a silica plate providing an airtight seal, a microwave supplier for propagating a microwave in TE11 mode, and a cylindrical waveguide connected at one end to the microwave supplier.
Patent
Distance measuring device especially for measuring the fill level in industrial tanks
TL;DR: In this article, a cylindrical waveguide is used to measure the fill level in industrial tanks, which includes electronic transmitting-and receiving elements for short wave electromagnetic waves, such as microwaves, and a waveguide window separating the two spaces and made of a material such as quartz glass, which is transmissive with respect to electromagnetic waves.
Patent
Microwave absorber using gaseous cooling fluid
Paul G. Schuller,Rolf Wilhelm +1 more
TL;DR: In this paper, a microwave absorber with a microwave-absorbing material, a protective hong surrounding this, and a waveguide leading into the protective housing, through which waveguide the microwaves to be absorbed can be conducted to the absorbing material, the microwave absorbing material forming a solid body with a hollow, on one side of which the waveguide opens, a termination element being arranged on the side of the hollow opposite to the waveguarded, and the housing being provided with an inlet and an outlet for a cooling fluid.
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Patent
End load for microwave ovens
TL;DR: In this paper, an end load for a microwave oven for efficiently attenuating microwave energy escaping from an oven access port is presented, which consists of an inner cylindrical member and a concentrically mounted, outer conductive member.