Patent
Zinc oxide sintered compact, process for producing the zinc oxide sintered compact, sputtering target, and electrode
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TLDR
In this paper, a low-resistance transparent electrode obtained by sputtering has been stabilized using a target comprising a metal component dispersed in a dense sintered compact composed mainly of ZnO.Abstract:
Disclosed is a low-resistance transparent electrode obtained by sputtering which has been stabilized using a target comprising a metal component dispersed in a dense sintered compact composed mainly of ZnO. Also disclosed is a process for producing a zinc oxide sintered compact. The zinc oxide sintered compact has been rendered electrically conductive by incorporating one or more additive elements among B, Al, Si, Sc, Ti, V, Ga, Y, Zr, Mo, Ag, Hf, Ce, and Dy, into ZnO. Further, the content of Zn in a formed ZnO film can be rendered larger than the stoichiometric composition by dispersing an unoxidized metallic Zn in the sintered compact. According to the process for producing a zinc oxide sintered compact, a powder, before main firing, of a mixture of three kinds of powders of a ZnO powder, a metallic Zn powder, and a powder containing the above additive elements is granulated and molded, and the molded product is fired in a non-oxidizing atmosphere to obtain a zinc oxide sintered compact.read more
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Rotating cathode target, its production and film formed by using this target
Kida Otojiro,Suzuki Yoko +1 more
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