What are the potential solutions to address the offset and hysteresis issues in accelerometer MEMS devices?
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Potential solutions to address the offset and hysteresis issues in accelerometer MEMS devices include decomposition methods to analyze and reduce offset components , utilizing symmetric structures and configurations for improved offset stabilization , implementing output offset minimized capacitance-to-digital interfaces with nested digital chopping feedback loops for offset minimization , studying zero offset variations under thermal hysteresis conditions and proposing calibration methodologies for zero offset and drift , and employing self-calibration and compensation methods using AC reference displacement and mechanical stiffness amplification for bias drift reduction . These approaches offer ways to quantitatively analyze, stabilize, minimize, and calibrate offset and hysteresis in MEMS accelerometers, ultimately enhancing their performance and accuracy.
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| Papers (5) | Insight |
|---|---|
14 Apr 2022 1 Citations | Temperature drift compensation through self-calibration using AC reference displacement and double-sided parallel plates capacitors effectively reduces bias offset drift in MEMS accelerometers, as demonstrated in the study. |
23 Jun 2021 | Potential solutions include identifying zero offset components dependent on thermal dynamics, proposing calibration methodologies for initial zero offset and drift, and considering direct sensor readouts or navigation system parameters for addressing offset and hysteresis in accelerometer MEMS devices. |
| Potential solutions include a gain-enhanced VCO-based quantization loop and a nested digital chopping feedback loop to minimize output offset caused by factors like bond-wire drift in MEMS accelerometers. | |
4 Citations | Potential solutions for addressing offset in MEMS capacitive accelerometers include analyzing and reducing fabricated gap mismatch, quantitatively analyzing compositions, and developing methods to measure key parameters for offset decomposition. |
| Potential solutions include symmetric sensing MEMS structures, aligned spring axes with electrode patterns, varied electrodes, and reference structures with multiple symmetry axes, aiding in offset minimization in out-of-plane sensing accelerometers. |
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