Showing papers on "Micropump published in 1989"
20 Feb 1989
TL;DR: In this article, a normally closed microvalve and a micropump were fabricated on a silicon wafer by micromachining techniques, and the controllable gas flow rate was from 0.1 ml/min to 85 ml /min at a gas pressure of 0.75 kgf/cm/sup 2.
Abstract: A normally closed microvalve and micropump were fabricated on a silicon wafer by micromachining techniques. Normally closed microvalve has a silicon diaphragm and a small piezoelectric actuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm/sup 2/. The micropump is a diaphragm-type pump which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 mu l/min and 780 mmH/sub 2/O/cm/sup 2/, respectively. >
194 citations
12 Jun 1989
TL;DR: A silicon micropump, provided with piezoelectric valves, which can be manufactured by established integrated circuit techniques, is described in this paper, where a pressure of 60 cm of water can be achieved.
Abstract: A silicon micropump, provided with piezoelectric valves, which can be manufactured by established integrated circuit techniques, is described. The micropump can be used to pump liquids or gases at a very low rate, which can be accurately prescribed. The body of the pump and the valves are made of silicon and glass, and contain piezoelectric material which allows opening and closing the valves electrically. Pumping speeds up to 3 mu l/min were shown to be feasible and a pressure of 60 cm of water could be achieved. >
189 citations
TL;DR: In this paper, a normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques, with a movable silicon diaphragm and a small piezoactuator to drive it.
147 citations
TL;DR: In this article, a miniature pump (micropump) was fabricated on a silicon substrate, which was composed of an inlet and outlet having a one-way microvalve, a pressure chamber formed on an Si substrate and a miniature piezoactuator.
Abstract: Utilizing micromachining based on the semiconductor device fabrication technique, a miniature pump (micropump) was fabricated on a silicon substrate. The purpose of this study is to integrate a conventional chemical analyzing system on an Si substrate by using microchemical sensors such as ISFET's and microvalves. The micropump was the diaphragm type. The pump was composed of an inlet and outlet having a one-way microvalve, a pressure chamber formed on an Si substrate and a miniature piezoactuator. The size of the pump was 8 mm x 10 mm x 10 mm and the flow rate on the order of μl/min could easily be controlled by the voltage signal applied to the actuator. To monitor the flow of the pump, a differential pressure sensor which could be formed on the Si substrate was developed. The sensor was composed of a oneway valve and a piezoresistive diaphragm-type pressure sensor, and had a high sensitivity to small flow.
13 citations
Patent•
10 Aug 1989
TL;DR: In this paper, a micropump operating in accordance with the principle of thermal expansion of the pumped gas is described, where all movable pump parts, the pump chamber and the gas outlet are integrated in a semiconductor chip.
Abstract: For the purpose of delivering extremely small amounts of gas, a micropump operating in accordance with the principle of thermal expansion of the pumped gas is described. All movable pump parts, the pump chamber and the gas outlet are integrated in a semiconductor chip. The gas inlet and the heater are integrated in a second chip which is connected to the first chip with the aid of an anodic connection technique. The specified process is employed to fabricate the micropump with the aid of the methods of micromechanics. Because of the high degree of miniaturisation, the micropump can be integrated on one chip with other components fabricated micromechanically or with electronic components.
8 citations