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Abhijit Basu Mallick
Researcher at Applied Materials
Publications - 2
Citations - 77
Abhijit Basu Mallick is an academic researcher from Applied Materials. The author has contributed to research in topics: Silicon oxide & Layer (electronics). The author has an hindex of 2, co-authored 2 publications receiving 77 citations.
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Patent
Methods for forming a silicon oxide layer over a substrate
TL;DR: In this article, a method of depositing a silicon oxide layer over a substrate includes providing a substrate to a deposition chamber, where a first silicon-containing precursor, a second siliconcontaining precursor and a NH3 plasma are reacted to form a silicon dioxide layer.
Patent
Methods for forming silicon oxide layer over substrate
D Nemani Srinivas,スリニヴァス, ディー ネマニ,,Abhijit Basu Mallick,アビジット, バス マリック,,Ellie Yieh,エリー, ワイ イー, +5 more
TL;DR: In this article, a method of depositing a silicon oxide layer over a substrate includes providing a substrate to a deposition chamber, and NH3 plasma is reacted to form a silicon dioxide layer.