E
Ellie Yieh
Researcher at Applied Materials
Publications - 206
Citations - 7503
Ellie Yieh is an academic researcher from Applied Materials. The author has contributed to research in topics: Layer (electronics) & Dielectric. The author has an hindex of 44, co-authored 202 publications receiving 7458 citations.
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Patent
Post-deposition treatment to enhance properties of Si-O-C low k films
TL;DR: In this paper, a post deposition treatment that densifies the film in a reducing atmosphere to enhance stability if the film is to be cured ex-situ was proposed. But this method is not suitable for silicon-oxygen-carbon low dielectric constant films that have been deposited at low temperature.
Patent
Method and system for improving dielectric film quality for void free gap fill
Abhijit Basu Mallick,Jeffrey C. Munro,Linlin Wang,Srinivas D. Nemani,Yi Zheng,Zheng Yuan,Dimitry Lubomirsky,Ellie Yieh +7 more
TL;DR: In this article, the authors proposed a method of forming a silicon oxide layer on a substrate by providing a substrate and forming an oxide layer overlying at least a portion of the substrate including residual water, hydroxyl groups, and carbon species.
Patent
Methods and apparatus for cleaning surfaces in a substrate processing system
TL;DR: In this paper, the authors proposed a method for cleaning a processing chamber, which consists of depositing a dielectric film on a wafer on a ceramic heater in the processing chamber in a first time period, with the ceramic heater heated to a first temperature of at least about 500° C during the deposition step; and introducing reactive species into the process chamber from a clean gas that is input to a remote microwave plasma system during a second time period.
Patent
High quality silicon oxide films by remote plasma cvd from disilane precursors
TL;DR: In this paper, a method of depositing a silicon and nitrogen containing film on a substrate was proposed, where the radical nitrogen and silicon-containing precursors react and deposit the silicon-and nitrogen-containing film on the substrate.