A
Akella V. S. Satya
Researcher at KLA-Tencor
Publications - 14
Citations - 989
Akella V. S. Satya is an academic researcher from KLA-Tencor. The author has contributed to research in topics: Die (integrated circuit) & Wafer. The author has an hindex of 14, co-authored 14 publications receiving 989 citations.
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Patent
Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices
TL;DR: In this article, a method for detecting electrical defects on test structures of a semiconductor die is described, where the test structures each have a portion located partially within a scan area.
Patent
Methods and systems for predicting IC chip yield
TL;DR: In this article, the authors present methods and apparatus for efficiently managing IC chip yield learning, which includes a systematic yield (Y 0 ), a defect density (DD), and a defect clustering factor (α).
Patent
Test structures and methods for inspection of semiconductor integrated circuits
Akella V. S. Satya,Gustavo A. Pinto,David L. Adler,Robert Thomas Long,Neil Richardson,Kurt H. Weiner,David J. Walker,Lynda C. Mantalas +7 more
TL;DR: In this paper, a semiconductor die having a scanning area is described, where each of the test structures in the first plurality of test structures is located entirely within the scanning area.
Patent
Multiple directional scans of test structures on semiconductor integrated circuits
Gustavo A. Pinto,Brian C. Leslie,David L. Adler,Akella V. S. Satya,Robert Thomas Long,David J. Walker +5 more
TL;DR: In this article, the number of defects per an area of the sample is found as a result of the first scan, and the position of one or more of the found defects is determined from the second scan.
Patent
Inspectable buried test structures and methods for inspecting the same
TL;DR: In this paper, a semiconductor die having a lower test structure formed in a lower metal layer of the die is described, where the lower conductive test structure has a first end and a second end coupled to a predetermined voltage level.