Showing papers by "Aram Amassian published in 2004"

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Journal Article•DOI•

Mechanical and optical properties of hard SiCN coatings prepared by PECVD

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P. Jedrzejowski¹, J. Cizek², Aram Amassian¹, Jolanta E. Klemberg-Sapieha¹, Jaroslav Vlček², Ludvik Martinu¹ - Show less +2 more•Institutions (2)

École Polytechnique¹, University of West Bohemia²

30 Jan 2004-Thin Solid Films

TL;DR: In this article, SiCN films were fabricated by PECVD from SiH4/CH4/N2/Ar gas mixtures at a temperature of 400 °C.

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147 citations

Journal Article•DOI•

Study of TiO2 film growth mechanisms in low-pressure plasma by in situ real-time spectroscopic ellipsometry

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Aram Amassian¹, Patrick Desjardins¹, Ludvik Martinu¹•Institutions (1)

École Polytechnique¹

30 Jan 2004-Thin Solid Films

TL;DR: In this article, the initial stages of growth of TiO2 films prepared by plasma-enhanced chemical vapor deposition on plasma pre-oxidized c-Si were investigated using in situ real-time spectroscopic ellipsometry.

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45 citations