Showing papers by "Arif Sanli Ergun published in 2000"
Patent•
30 Nov 2000TL;DR: In this article, a wide frequency band micromachined microphone including a plurality of micro-achined cells of the type including electrodes carried by a membrane supported above a common electrode with conductive lines interconnecting the electrodes is described.
Abstract: A wide frequency band micromachined microphone including a plurality of micromachined cells of the type including electrodes carried by a membrane supported above a common electrode with conductive lines interconnecting the electrodes is described. A method of operating a microphone array is also described.
26 citations
Patent•
18 Dec 2000TL;DR: In this article, a wide frequency band micromachined microphone including a plurality of micro-achined cells of the type including electrodes carried by a membrane supported above a common electrode with conductive lines interconnecting the electrodes is described.
Abstract: A wide frequency band micromachined microphone including a plurality of micromachined cells of the type including electrodes carried by a membrane supported above a common electrode with conductive lines interconnecting the electrodes is described. A method of operating a microphone array is also described.
4 citations
22 Oct 2000
TL;DR: In this article, the authors show that, together with the RF detection method that provides a very sensitive and broadband acoustic detection, it is possible to operate the cMUTs at very low frequencies, which covers the microphone and sonar applications.
Abstract: Capacitive micromachined transducers have long been used as generators and detectors of ultrasound both in air and immersion applications. Typically, the frequency of operation has been in the MHz range. However, they can still be operated at very low frequencies, where their mechanical sensitivity is poor, but the frequency response is flat. In this paper we show that, together with the RF detection method that provides a very sensitive and broadband acoustic detection, it is possible to operate the cMUTs at very low frequencies, which covers the microphone and sonar applications.
2 citations