The use of liquid metals based on gallium for soft and stretchable electronics is discussed. This emerging class of electronics is motivated, in part, by the new opportunities that arise from devices that have mechanical properties similar to those encountered in the human experience, such as skin, tissue, textiles, and clothing. These types of electronics (e.g., wearable or implantable electronics, sensors for soft robotics, e-skin) must operate during deformation. Liquid metals are compelling materials for these applications because, in principle, they are infinitely deformable while retaining metallic conductivity. Liquid metals have been used for stretchable wires and interconnects, reconfigurable antennas, soft sensors, self-healing circuits, and conformal electrodes. In contrast to Hg, liquid metals based on gallium have low toxicity and essentially no vapor pressure and are therefore considered safe to handle. Whereas most liquids bead up to minimize surface energy, the presence of a surface oxide on these metals makes it possible to pattern them into useful shapes using a variety of techniques, including fluidic injection and 3D printing. In addition to forming excellent conductors, these metals can be used actively to form memory devices, sensors, and diodes that are completely built from soft materials. The properties of these materials, their applications within soft and stretchable electronics, and future opportunities and challenges are considered.

Stretchable and Soft Electronics using Liquid Metals.

Gallium and several of its alloys are liquid metals at or near room temperature. Gallium has low toxicity, essentially no vapor pressure, and a low viscosity. Despite these desirable properties, applications calling for liquid metal often use toxic mercury because gallium forms a thin oxide layer on its surface. The oxide interferes with electrochemical measurements, alters the physicochemical properties of the surface, and changes the fluid dynamic behavior of the metal in a way that has, until recently, been considered a nuisance. Here, we show that this solid oxide “skin” enables many new applications for liquid metals including soft electrodes and sensors, functional microcomponents for microfluidic devices, self-healing circuits, shape-reconfigurable conductors, and stretchable antennas, wires, and interconnects.

Emerging Applications of Liquid Metals Featuring Surface Oxides

Piezo-actuated stages have become more and more promising in nanopositioning applications due to the excellent advantages of the fast response time, large mechanical force, and extremely fine resolution. Modeling and control are critical to achieve objectives for high-precision motion. However, piezo-actuated stages themselves suffer from the inherent drawbacks produced by the inherent creep and hysteresis nonlinearities and vibration caused by the lightly damped resonant dynamics, which make modeling and control of such systems challenging. To address these challenges, various techniques have been reported in the literature. This paper surveys and discusses the progresses of different modeling and control approaches for piezo-actuated nanopositioning stages and highlights new opportunities for the extended studies.

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Soft electronics are intensively studied as the integration of electronics with dynamic nonplanar surfaces has become necessary. Here, a discussion of the strategies in materials innovation and structural design to build soft electronic devices and systems is provided. For each strategy, the presentation focuses on the fundamental materials science and mechanics, and example device applications are highlighted where possible. Finally, perspectives on the key challenges and future directions of this field are presented.

Materials and Structures toward Soft Electronics.

Liquid metal nanoparticles that are mechanically sintered at and below room temperature are introduced. This material can be sintered globally on large areas of entire deposits or locally to create liquid traces within deposits. The metallic nanoparticles are fabricated by dispersing a liquid metal in a carrier solvent via sonication. The resulting dispersion is compatible with inkjet printing, a process not applicable to the bulk liquid metal in air.

Mechanically Sintered Gallium–Indium Nanoparticles

A method to produce soft and stretchable microelectronics composed of a liquid-phase Gallium-Indium alloy with micron-scale circuit features is introduced. Microchannels are molded onto the surface of a poly(dimethylsiloxane) (PDMS) elastomer and filled with EGaIn using a micro-transfer deposition step that exploits the unique wetting properties of EGaIn in air. The liquid-filled channels function as stretchable circuit wires or capacitor electrodes with a 2 μm linewidth and 1 μm spacing.

High-density soft-matter electronics with micron-scale line width.

Modeling and experimentation of bone drilling forces

This paper presents design and evaluation of a mechanical nanomanufacturing system for performing the nanomilling process. The nanomilling process uses a nanotool (an atomic force microscope probe tip) that is rotated at high speeds to fabricate three-dimensional (3D) nano-scale features on a sample surface. After explaining the kinematics of the two nanomilling process configurations, the nanomilling system, including the 3D piezoelectric actuator that rotates the nanotool, the nanopositioning stage that provides the feeding and depth motions, and the software program that controls the nanomilling motions are described. A measurement system is then constructed to measure the dynamic nanomilling motions. A compensation algorithm is developed to enable obtaining desired nanotool motions in the presence of frequency and amplitude-dependent nonlinearities of the 3D piezoelectric actuator. The nanomilling system is then evaluated directly by measuring the nanotool motions, and indirectly by assessing the accuracy of the fabricated nanoscale features. It was shown that the nanomilling system facilitates fabrication of complex nano-scale features with high accuracy through the high-stiffness nanotool assembly and high-frequency (compensated) nanotool motions.

Design and evaluation of a mechanical nanomanufacturing system for nanomilling

We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as nanomilling. An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectric actuator is used as the nanotool. By circumventing the high-compliance AFM beam and directly attaching the tip onto the piezoelectric actuator, a high-stiffness arrangement is realized. The feeding motions and depth prescription are provided by a nano-positioning stage. It is shown that nanomilling is capable of removing the material in the form of long curled chips, indicating shearing as the dominant material removal mechanism. Feature-size and shape control capabilities of the method are demonstrated.

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A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling

Micromachining dynamics commonly dictate the attainable accuracy and throughput that can be obtained from micromachining operations. The dynamic behavior of miniature ultra-high-speed (UHS) spindles used in micromachining critically affects micromachining dynamics. As such, there is a strong need for effective techniques to characterize the dynamic behavior of miniature UHS spindles. This paper presents a systematic experimental approach to obtain the speed-dependent two-dimensional dynamics of miniature UHS spindles through experimental modal analysis. A miniature cylindrical artifact with 5 mm overhang is attached to (and rotating with) the spindle to enable providing the dynamic excitations to and measuring the resulting motions of the spindle. A custom-made impact excitation system is used to reproducibly excite the spindle dynamics up to 20 kHz while controlling the impact force. The resulting radial motions of the spindle are measured in two mutually perpendicular directions using two independent fiber-optic laser Doppler vibrometers (LDVs). To ensure the mutual orthogonality of the measurements, the two lasers are aligned precisely using an optical procedure. A frequency-domain filtering approach is used to remove the unwanted spindle motion data from the measurements, thereby isolating the dynamic response. The spindle dynamics is then represented in the form of frequency response functions (FRFs). A global curve-fitting technique is applied to identify natural frequencies and damping ratios. The developed approach is demonstrated on a miniature UHS spindle with aerodynamic bearings, and dynamic characteristics are analyzed at different spindle speeds and collet pressures. The spindle speed is shown to have a significant effect on dynamic response, especially at higher spindle speeds, while the collet pressure is observed not to have any significant effect on the spindle dynamics. It is concluded that the presented approach can be used to characterize the dynamics of miniature UHS spindles effectively.

B. Arda Gozen

Papers

High-density soft-matter electronics with micron-scale line width.

Modeling and experimentation of bone drilling forces

Design and evaluation of a mechanical nanomanufacturing system for nanomilling

A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling

Dynamics of ultra-high-speed (UHS) spindles used for micromachining