C
C. Arena
Researcher at ASM International
Publications - 1
Citations - 50
C. Arena is an academic researcher from ASM International. The author has contributed to research in topics: Lattice constant & Strained silicon. The author has an hindex of 1, co-authored 1 publications receiving 50 citations.
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Highly Tensile Strained Silicon Carbon Phosphorus Alloys Epitaxially Grown into Recessed Source Drain Areas of NMOS devices
TL;DR: In this paper, the growth rate of up to 82 nm/min (at 550degC) led to films incorporating up to 3.6% substitutional carbon according to Vegard's law; (2.8% after (Kelires, 1998)) and an alpha/epi growth rate ratio of 1.5-1.5 mOmegacm.