II-1 – Glow Discharge Sputter Deposition

A pin-on-disc surface friction tester designed by the authors was used to measure the surface friction temperature of a carbon graphite brush sliding against a copper ring under the condition of no flow by electric current. Microelectromechanical systems (MEMS) fabrication techniques including sputtering, lithography, and etching processes were utilized to fabricate metal film temperature sensors on the surface of the carbon graphite brush. The true temperature measurement system of the friction surface of the carbon graphite brush was then established. A USB-DAQ system and LabVIEW software were adopted for the data acquisition/management of analog signals. In this research, the relationship between friction temperature and wear rate was investigated using experiment data. Optical and scanning electron microscope (SEM) images of the friction surface of the carbon graphite brush were taken and analyzed to study the effect of temperature on the friction surface. From this experiment, it was found that the d...

Measurement of Friction Surface and Wear Rate between a Carbon Graphite Brush and a Copper Ring

The results of investigations of the reactions of copper films with antimony films and bulk tellurium, aluminium films with antimony films and bulk antimony, gold films with bulk zinc and silver films with bulk tellurium are presented. Intermetallic compounds are formed when the films are sputtered, but there is no reaction when they are evaporated.

C. Misiano

Papers

Surface temperature measurements during thin film deposition by r.f. sputtering