Learn the basic properties and designs of modern VLSI devices, as well as the factors affecting performance, with this thoroughly updated second edition. The first edition has been widely adopted as a standard textbook in microelectronics in many major US universities and worldwide. The internationally-renowned authors highlight the intricate interdependencies and subtle tradeoffs between various practically important device parameters, and also provide an in-depth discussion of device scaling and scaling limits of CMOS and bipolar devices. Equations and parameters provided are checked continuously against the reality of silicon data, making the book equally useful in practical transistor design and in the classroom. Every chapter has been updated to include the latest developments, such as MOSFET scale length theory, high-field transport model, and SiGe-base bipolar devices.

/pdf/fundamentals-of-modern-vlsi-devices-471xd7l9pf.pdf

Fundamentals of Modern VLSI Devices

A unified flicker noise model which incorporates both the number fluctuation and the correlated surface mobility fluctuation mechanism is discussed. The latter is attributed to the Coulombic scattering effect of the fluctuating oxide charge. The model has a functional form resembling that of the number fluctuation theory, but at certain bias conditions it may reduce to a form compatible with Hooge's empirical expression. The model can unify the noise data reported in the literature, without making any ad hoc assumption on the noise generation mechanism. Specifically, the model can predict the right magnitude and bias dependence of the empirical Hooge parameter. Simulated flicker noise characteristics obtained with a circuit-simulation-oriented flicker noise model based on the new formulation were compared with experimental noise data. Excellent agreement between the calculations and measurement was observed in both the linear and saturation regions for MOS transistors fabricated by different technologies. The work shows that the flicker noise in MOS transistors can be completely explained by the trap charge fluctuation mechanism, which produces mobile carrier number fluctuation and correlated surface mobility fluctuation. >

A unified model for the flicker noise in metal-oxide-semiconductor field-effect transistors

A semiempirical model for carrier mobility in silicon inversion layers is presented. The model, strongly oriented to CAD (computer-aided design) applications, is suitable for two-dimensional numerical simulations of nonplanar devices. A local mobility function, set up in terms of a simple Mattiessen's rule, provides a careful description of MOSFET operation in a wide range of normal (or gate) electric fields, channel impurity concentrations of between 5*10/sup 14/ cm/sup -3/ and 10/sup 17/ cm/sup -3/ for the acceptor density of states and 6*10/sup 14/ cm/sup -3/ and 3*10/sup 17/ cm/sup -3/ for the donor density of states; and temperatures between 200 K and 460 K. Best-fit model parameters are extracted by comparing the calculated drain conductance with a very large set of experimental data points. >

A physically based mobility model for numerical simulation of nonplanar devices

Accurate modeling of MOS devices requires quantitative knowledge of carrier mobilities in surface inversion and accumulation layers. Optimization of device structures and accurate circuit simulation, particulary as technologies push toward fundamental limits, necessitate an understanding of how impurity doping levels, oxide charge densities, process techniques, and applied electric fields affect carrier surface mobilities. It is the purpose of this paper to present an extensive set experimental results on the behavior of electron surface mobility in thermally oxidized silicon structures. Empirical equations are developed which allow the calculation of electron mobility under a wide variety of substrate, process, and electrical conditions. The experimental results are interpreted in terms of the dominant physical mechanisms responsible for mobility degradation at the Si/SiO 2 interface. From the observed effects of process parameters on mobility roll-off under high vertical fields, conclusions are drawn about optimum process conditions for maximizing mobility. The implications of this work for performance limits of several types of MOS devices are described.

Electron mobility in inversion and accumulation layers on thermally oxidized silicon surfaces

In this paper, we discuss the low-drain voltage transconductance behavior of the MOSFET due to surface mobility variation, interface states and small geometry, and its application in threshold voltage determination. We modify the Pao-Sah drain current model to incorporate a mobility model and obtain 3% accuracy from subthreshold to very strong inversion for a wide range of substrate biases. The effects of non-ideal scaling, finite inversion layer thickness, surface roughness mobility degradation under high normal electric fields and interface states on the transconductance behavior are discussed. We observe the peak transconductance increases with substrate bias in short-channel devices and decreases with substrate bias in long-channel devices. Finally, we show the threshold voltage can be determined from the gate voltage at which the rate of transconductance change ( ∂g m ∂V GS ) is a maximum. This threshold voltage is identifiable with a known band-bending (surface potential) of the substrate (φ s ⋍ 2φ F + V SB ) , from which the band-bending at all gate biases can be calculated. The transconductance change (TC) method is insensitive to device degradations (e.g. mobility, series resistance, hot-carrier) in contrast to the conventional method of linear extrapolation to zero drain current.

Modeling of transconductance degradation and extraction of threshold voltage in thin oxide MOSFET's

The scattering of electrons by surface oxide charges and by lattice vibrations at the silicon-silicon dioxide interface

Fast surface states at the silicon‐silicon dioxide interface have been studied using the MOS capacitor structure with a very thin oxide (50–100 A), which greatly enhances the effect of the surface states on the capacitance‐voltage characteristics. On p‐type silicon, a surface‐state distribution with a peak at 0.3 eV above the valence band is observed. Comparison of the experimental results with theoretical calculations based on the equivalent circuit model is made. Total density of state of 5.4×1012/cm2 with a peak of 3×1013 surface states/cm2 eV are observed.

C.T. Sah

Papers

The scattering of electrons by surface oxide charges and by lattice vibrations at the silicon-silicon dioxide interface

Thin‐oxide mos capacitance studies of fast surface states

The effects of polarizer ellipticity on ellipsometry measurements

Studies of electron screening effects on the electron mobility in silicon surface inversion layers