Showing papers by "Carlos Angulo Barrios published in 2013"
TL;DR: In this paper, a non-chemically amplified negative-tone electron-beam resist with an extremely high sensitivity is presented, which exhibits a crosslinking threshold dose as low as 0.5 μC cm−2.
Abstract: A non-chemically amplified negative-tone electron-beam resist with an extremely high sensitivity is presented in this work. The resist, poly(2-hydroxyethyl methacrylate-co-2-methacrylamidoethyl methacrylate) (P(HEMA-co-MAAEMA)), has been synthesized using free radical polymerization of 2-hydroxyethyl methacrylate and 2-aminoethyl methacrylate, and exhibits a crosslinking threshold dose as low as 0.5 μC cm−2. Exposed resist patterns show good adherence to silicon substrates without the assistance of adhesion promoters or thermal treatments and are shown to be adequate for use as a mask for both wet and dry etching of Si. A low contrast value of 1.2 has been measured, indicating that the synthesized polymeric mixture is particularly suitable for achieving grey (3D) lithography. Other relevant properties of the new e-beam resist are optical transparency, visible photoluminescence when crosslinked at low electronic doses, and dose-dependent dual-tone behaviour.
25 citations
TL;DR: A novel, effective, and low-cost material, focusing on the immobilization of bioreceptors and consequent biosensing, is developed, which allows the spatial discrimination depending on the irradiation of desired areas.
Abstract: The negative epoxy-based SU-8 photoresist has a wide variety of applications within the semiconductor industry, photonics and lab-on-a-chip devices, and it is emerging as an alternative to silicon-based devices for sensing purposes. In the present work, biotinylation of the SU-8 polymer surface promoted by light is reported. As a result, a novel, effective, and low-cost material, focusing on the immobilization of bioreceptors and consequent biosensing, is developed. This material allows the spatial discrimination depending on the irradiation of desired areas. The most salient feature is that the photobiotin may be directly incorporated into the SU-8 curing process, consequently reducing time and cost. The potential use of this substrate is demonstrated by the immunoanalytical detection of the synthetic steroid gestrinone, showing excellent performances. Moreover, the naked eye biodetection due to the transparent SU-8 substrate, and simple instrumental quantification are additional advantages.
5 citations