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Chi-Chien Ho
Researcher at Texas Instruments
Publications - 2
Citations - 9
Chi-Chien Ho is an academic researcher from Texas Instruments. The author has contributed to research in topics: Design for manufacturability & Reticle. The author has an hindex of 2, co-authored 2 publications receiving 9 citations.
Papers
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Proceedings ArticleDOI
Design, mask, and manufacturability
TL;DR: In this article, the authors discuss how to optimize the reticle layout to meet the needs of optical proximity correction (OPC) and phase-shifting masks (PSM).
Proceedings ArticleDOI
Challenges and solutions for trench lithography beyond 65nm node
Zhijian Lu,Chi-Chien Ho,Mark E. Mason,Anderson Andrew,Randy Mckee,Ricky A. Jackson,Cynthia Zhu,Mark Terry +7 more
TL;DR: In this paper, the authors address several root causes for pattern induced defects and present solutions to a variety of weak spots including "T-shape", "H-shape," "Thin-Line", and "Bowling Pin" defects during 65nm product development at TI.