scispace - formally typeset
C

Chien-Hung Liu

Researcher at National Chung Hsing University

Publications -  86
Citations -  1376

Chien-Hung Liu is an academic researcher from National Chung Hsing University. The author has contributed to research in topics: Laser & Diffraction. The author has an hindex of 20, co-authored 82 publications receiving 1266 citations. Previous affiliations of Chien-Hung Liu include National Chung Cheng University & National Formosa University.

Papers
More filters
Journal ArticleDOI

Measurement and tracking control of the Z‐tilts error compensating stage of the nano‐measuring machine

TL;DR: A feedforward compensator with a proportional integral (PI) type controller is designed to compensate for the hysteresis nonlinearity of a piezoelectric actuated three degree‐of‐freedom coplanar nanostage which can provide high‐precision applications.