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Chien-Hung Liu
Researcher at National Chung Hsing University
Publications - 86
Citations - 1376
Chien-Hung Liu is an academic researcher from National Chung Hsing University. The author has contributed to research in topics: Laser & Diffraction. The author has an hindex of 20, co-authored 82 publications receiving 1266 citations. Previous affiliations of Chien-Hung Liu include National Chung Cheng University & National Formosa University.
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Measurement and tracking control of the Z‐tilts error compensating stage of the nano‐measuring machine
TL;DR: A feedforward compensator with a proportional integral (PI) type controller is designed to compensate for the hysteresis nonlinearity of a piezoelectric actuated three degree‐of‐freedom coplanar nanostage which can provide high‐precision applications.