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Chih-Chung Tseng

Researcher at National Chung Hsing University

Publications -  2
Citations -  168

Chih-Chung Tseng is an academic researcher from National Chung Hsing University. The author has contributed to research in topics: Thin film & Sputtering. The author has an hindex of 2, co-authored 2 publications receiving 152 citations.

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Effects of H2 plasma treatment on properties of ZnO:Al thin films prepared by RF magnetron sputtering

TL;DR: In this article, the effects of H2 plasma treatment on structural, electrical, and optical properties of al-doped ZnO (AZO) thin films were investigated on glass substrates by radiofrequency magnetron sputtering at deposition temperatures ranging from room temperature (RT) to 300 °C for transparent electrode applications.
Journal ArticleDOI

Influence of hydrogen plasma treatment on Al-doped ZnO thin films for amorphous silicon thin film solar cells

TL;DR: In this paper, the effects of H 2 plasma treatment on characteristics of Al-doped ZnO (AZO) thin films prepared by RF magnetron sputter at 200°C for amorphous silicon (α-Si) thin film solar cell fabrication were investigated.