C
Christian J. Werkhoven
Researcher at ASM International
Publications - 1
Citations - 130
Christian J. Werkhoven is an academic researcher from ASM International. The author has contributed to research in topics: Nitriding & LOCOS. The author has an hindex of 1, co-authored 1 publications receiving 130 citations.
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Low temperature silicon compound deposition
Ruben Haverkort,Yuet Mei Wan,Marinus Josephus De Blank,Cornelius A. van der Jeugd,Jacobus Johannes Beulens,Michael A. Todd,Keith Doran Weeks,Christian J. Werkhoven,Christophe F. Pomarede +8 more
TL;DR: In this paper, a batch reaction chamber is used to form ultra high quality silicon-containing compound layers, e.g., silicon nitride layers, at low temperatures, under reaction rate limited conditions, using trisilane as the silicon precursor.