D
D. W. Burns
Publications - 1
Citations - 261
D. W. Burns is an academic researcher. The author has contributed to research in topics: Combustion chemical vapor deposition & Thin film. The author has an hindex of 1, co-authored 1 publications receiving 260 citations.
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A simple technique for the determination of mechanical strain in thin films with applications to polysilicon
TL;DR: In this article, the authors show that free standing, doubly supported micromechanical beams which are fabricated from films with built-in compressive strain fields buckle at critical geometries.