Precision positioning of an object relative to a reference point is a common task in many activities of production engineering. Sensor technologies for single axis measurement, either linear or rotary, which form the fundamentals of measurement technologies for precision positioning, are reviewed. Multi-axis coordinate measurement methods such as triangulation and multilateration, as well as Cartesian and polar systems for specifying the position in a plane or three-dimensional (3D) space are then presented, followed by a discussion on traceability and standards. Some advanced applications of measurement technologies for precision positioning in manufacturing industries are also demonstrated.

Measurement technologies for precision positioning

This tutorial reviews various noncontact optical sensing techniques that can be used to measure distances to objects, and related parameters such as displacements, surface profiles, velocities and vibrations. The techniques that are discussed and compared include intensity-based sensing, triangulation, time-of-flight sensing, confocal sensing, Doppler sensing, and various kinds of interferometric sensing with both high- and low-coherence sources.

Optical methods for distance and displacement measurements

Preferred embodiments of the present invention are directed to systems for phase measurement which address the problem of phase noise using combinations of a number of strategies including, but not limited to, common-path interferometry, phase referencing, active stabilization and differential measurement. Embodiment are directed to optical devices for imaging small biological objects with light. These embodiments can be applied to the fields of, for example, cellular physiology and neuroscience. These preferred embodiments are based on principles of phase measurements and imaging technologies. The scientific motivation for using phase measurements and imaging technologies is derived from, for example, cellular biology at the sub-micron level which can include, without limitation, imaging origins of dysplasia, cellular communication, neuronal transmission and implementation of the genetic code. The structure and dynamics of sub-cellular constituents cannot be currently studied in their native state using the existing methods and technologies including, for example, x-ray and neutron scattering. In contrast, light based techniques with nanometer resolution enable the cellular machinery to be studied in its native state. Thus, preferred embodiments of the present invention include systems based on principles of interferometry and/or phase measurements and are used to study cellular physiology. These systems include principles of low coherence interferometry (LCI) using optical interferometers to measure phase, or light scattering spectroscopy (LSS) wherein interference within the cellular components themselves is used, or in the alternative the principles of LCI and LSS can be combined to result in systems of the present invention.

Systems and methods for phase measurements

Absolute fringe order calculation using optimised multi-frequency selection in full-field profilometry

We introduce a new optical interferometry system for fast areal surface measurement of microscale and nanoscale surfaces that are immune to environmental noise. Wavelength scanning interferometry together with an acousto-optic tunable filtering technique is used to measure surfaces with large step heights. An active servo control system serves as a phase-compensating mechanism to eliminate the effects of environmental noise. The system can be used for online or in-process measurement on a shop floor. Measurement results from two step height standard samples and a structured surface of a semiconductor daughterboard are presented. In comparison with standard step height specimens, the system achieved nanometer measurement accuracy. The measurement results of the semiconductor daughterboard, under mechanical disturbance, showed that the system can withstand environmental noise.

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Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise

It is easy to measure length accurately by means of optical interferometry. However, the measurement range of a single-frequency interferometer is limited to less than half the wavelength without a moving carriage to count interference fringes. To resolve this problem, a frequency scanning method had been developed. However, its phase resolution is not so high that the integer part of the order of the interference fringe can be accurately determined. We proposed a method to measure any length absolutely and accurately, by combining a high-resolution phase measurement technique with a frequency scanning technique. In this paper, this method was investigated by using a frequency scanning heterodyne interferometer. With heterodyne phase measurement, we achieved high resolution, higher than quarter wavelength, using the wide-range frequency scanning method. This means that we can measure the absolute length with nanometre accuracy, since the integer part of the order of the interference fringe for a wavelength is determined with the frequency scanning. We measured distances up to about 4 mm with an accuracy of about 3 nm.

https://iopscience.iop.org/article/10.1088/0957-0233/9/7/004/pdf

Dai Xiaoli

Papers

High-accuracy absolute distance measurement by means of wavelength scanning heterodyne interferometry