E
E Couderc
Researcher at Hoffmann-La Roche
Publications - 1
Citations - 22
E Couderc is an academic researcher from Hoffmann-La Roche. The author has contributed to research in topics: Nitride & Disilane. The author has an hindex of 1, co-authored 1 publications receiving 21 citations.
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Properties of nitrogen doped silicon films deposited by low pressure chemical vapour deposition from disilane and ammonia
TL;DR: In this article, Nitrogen doped silicon films have been deposited by low pressure chemical vapour deposition from disilane Si 2 H 6 and ammonia NH 3, pointing out the influences of the deposition temperature, the total pressure and the gas flow rates.