Molybdenum disilicide (MoSi2) is a promising candidate material for high temperature structural applications. It is a high melting point (2030 °C) material with excellent oxidation resistance and a moderate density (6.24 g/cm3). However, low toughness at low temperatures and high creep rates at elevated temperatures have hindered its commercialization in structural applications. Much effort has been invested in MoSi2 composites as alternatives to pure molybdenum disilicide for oxidizing and aggressive environments. Molybdenum disilicide-based heating elements have been used extensively in high-temperature furnaces. The low electrical resistance of silicides in combination with high thermal stability, electronmigration resistance, and excellent diffusion-barrier characteristics is important for microelectronic applications. Projected applications of MoSi2-based materials include turbine airfoils, combustion chamber components in oxidizing environments, missile nozzles, molten metal lances, industrial gas burners, diesel engine glow plugs, and materials for glass processing. In this paper, synthesis, fabrication, and properties of the monolithic and composite molybdenum silicides are reviewed.

Molybdenum silicide based materials and their properties

Epitaxial growth of transition-metal silicides on silicon

E. Rosencher

Papers

Molybdenum disilicide: Crystal growth, thermal expansion and resistivity

Ionization transients of shallow levels in silicon space charge layer at low temperature