F
F Kirscht
Researcher at Mitsubishi
Publications - 1
Citations - 199
F Kirscht is an academic researcher from Mitsubishi. The author has contributed to research in topics: Etching (microfabrication) & Lapping. The author has an hindex of 1, co-authored 1 publications receiving 185 citations.
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Raman microspectroscopy study of processing-induced phase transformations and residual stress in silicon
Yury Gogotsi,C Baek,F Kirscht +2 more
TL;DR: Raman spectroscopy was used for analysis of phase transformations and residual stress in machined silicon wafers as discussed by the authors, where wear debris from dicing of silicon was scanned with a Raman spectrometer.