A two-beam interferometer illuminates a sample surface with light at grazing incidence angles for the purpose of analyzing a surface characteristic such as surface topography. The interferometer includes a diffractive-optic beam splitter, which separates an incoming light beam into measurement and reference beams and a diffractive-optic beam combiner, which produces an output beam by interfering portions of the reference beam with reflected portions of the measurement beam. Those portions of the reference wavefront and the measurement wavefront that interfere originate from substantially the same portion of the initial illumination wavefront.

Grazing incidence interferometer and method

X-ray imaging in differential interference contrast (DIC) with submicrometer optical resolution was performed by using a twin zone plate (TZP) setup generating focal spots closely spaced within the TZP spatial resolution of 160 nm. Optical path differences introduced by the sample are recorded by a CCD camera in a standard full-field imaging and by an aperture photodiode in a standard scanning transmission x-ray microscope. Applying this x-ray DIC technique, we demonstrate for both the full-field imaging and scanning x-ray microscope methods a drastic increase in image contrast (approximately 20×) for a low-absorbing specimen, similar to the Nomarski DIC method for visible-light microscopy.

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Differential interference contrast x-ray microscopy with twin zone plates

Equipment and Procedures

An interferometer (10) employs diffractive optics (30 and 40) for measuring errors in test surfaces (14) that differ from planes and spheres. A beam of light (28) is separated into two portions (32 and 34). One of the diffractive optics (30) can be used to reshape the second portion (34) of a beam of light (28) into a form that is different than the first portion (32) along a path of grazing incidence to the test surface (14), and the other diffractive optic (40) can be used to further reshape the second portion (34) into a form in common with the first portion (32) of the beam of light (28). The two beam portions (32 and 34) are recombined to produce an interference pattern (44) representing the errors in the test surface (14).

Interferometric measurement of surfaces with diffractive optics at grazing incidence

We describe a novel approach for converting the specimens phase information into strong image contrast in the x-ray region, the differential interference contrast x-ray microscopy (X-DIC). In the used setup, X-DIC operation was accomplished by a twin zone plate (TZP), i. e. two zone plates on both sides of the same substrate, laterally shifted by about one outermost zonewidth. Once a TZP has been successfully produced by means of especially developed nanofabrication processes, it is as easy to use as a single zone plate, without any alignment difficulty or further requirements to the coherence of the illumination. The tremendeous contrast enhancement was demonstrated at the microscopy beamline ID21 at ESRF in Grenoble for test objects and biological samples. TZPs allow for full field X-DIC imaging as well as for DIC scanning transmission x-ray microscopy. The first experiments were carried out at 0.31 nm wavelength (4 keV photon energy), and features down to approx. 160 nm could be resolved in X-DIC.

Differential interference contrast X-ray microscopy with twin zone plates at ESRF beamline ID21

A new interferometric method for testing optical surfaces is given. It is related to Murty's Fresnel zone plate interferometer and suggests the fruitful applications of holography to this branch of optics. In this paper a theoretical model that explains both interferometers is developed. Experimental results and pertinent comments are included.

Fernando Broder-Bursztyn

Papers

Holographic interferometer to test optical surfaces.