F
Frank Klopf
Researcher at Bosch
Publications - 25
Citations - 145
Frank Klopf is an academic researcher from Bosch. The author has contributed to research in topics: Pressure sensor & Etching (microfabrication). The author has an hindex of 4, co-authored 25 publications receiving 144 citations.
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Patent
Method for Accelerated Etching of Silicon
Hubert Benzel,Stefan Pinter,Christoph Schelling,Tjalf Pirk,Julian Gonska,Frank Klopf,Christina Leinenbach +6 more
TL;DR: In this article, a method for the plasma-free etching of silicon using the etching gas ClF 3 or XeF 2 and its use is provided, where the silicon is provided having one or more areas to be etched as a layer on the substrate or as the substrate material itself.
Proceedings ArticleDOI
A small size high pressure sensor based on metal thin film technology
Arno Stoetzler,D. Dittmann,Ralf Henn,Axel Jasenek,Frank Klopf,Armin Scharping,Wilhelm Frey,Hans-Peter Didra,Matthias Metz +8 more
TL;DR: In this article, the basic design of the new miniaturized high pressure sensor chip based on metal thin film technology (MFT) is presented, and the steps of chip fabrication are addressed, and compared with alternative processes.
Patent
Micromechanical high-pressure sensor
TL;DR: A micromechanical pressure sensor has at least one membrane and a measuring element situated on the membrane, which results in deformation of the membrane as mentioned in this paper and the measuring element is subjected to elastic elongation and/or compression.
Patent
Method and device for electrochemical machining of substrates
TL;DR: In this article, a method and a device with the aid of which a substrate is electrochemically machined, material being removed from the surface of a conductive substrate with the assistance of an also conductive tool is presented.
Patent
Process for plasma-free etching of silicon with etching gas useful in production of deep structures such as through holes or troughs where silicon has one or more regions to be etched as layer on substrate or on substrate itself
Hubert Benzel,Julian Gonska,Frank Klopf,Christina Leinenbach,Stefan Pinter,Tjalf Pirk,Christoph Schelling +6 more
TL;DR: In this article, the process for plasma-free etching of silicon (Si) uses an etching gas carbon trifluoride (CF3) or xenon difluorside (XeF2) where the Si has one or more regions (20) to be etched as a layer on a substrate or on the substrate itself.