A chirped pulse amplification system includes one or more polarization compensator configured to compensate for polarization altering elements with the chirped pulse amplification system. The polarization compensator is responsive to a sensor configured to provide feedback to the polarization compensator. In some embodiments, the chirped pulse amplification system further includes a controller configured to automatically adjust the polarization compensator responsive to the sensor. The sensor is optionally a power sensor.

Automated polarization correction

A laser ablation method and apparatus uses a laser device to generate a pulsed laser using a laser device and to project the pulsed laser onto an ablation target to be ablated. A probe is then used to measure an indicative property of the ablation target or of the pulsed laser projected on the ablation target. A control loop is used to optimize ablation effect by generating a feedback signal according to the measured indicative property, sending the feedback signal to a control unit, and adjusting an output parameter of the pulsed laser according to the feedback signal. The measured indicative property may be a size of the laser beam spot or a material composition. The ablation, the feedback and the adjustment may be performed dynamically.

Laser ablation method and apparatus having a feedback loop and control unit

A defect inspection method and device for irradiating a linear region on a surface-patterned sample mounted on a table, with illumination light from an inclined direction to the sample, next detecting in each of a plurality of directions an image of the light scattered from the sample irradiated with the illumination light, then processing signals obtained by the detection of the images of the scattered light, and thereby detecting a defect present on the sample; wherein the step of detecting the scattered light image in the plural directions is performed through oval shaped lenses in which elevation angles of the optical axes thereof are different from each other, within one plane perpendicular to a plane formed by the normal to the surface of the table on which to mount the sample and the longitudinal direction of the linear region irradiated with the irradiation light.

Defect Inspection Method and Defect Inspection Device

A welding system has: a welding mechanism, a reception laser light source, a reception optical mechanism, an interferometer, a data recording/ analysis mechanism and a data recording/ analysis mechanism. The reception laser light source generates reception laser light so as to irradiate the object to be welded with the reception laser light for the purpose of detecting a reflected ultrasonic wave obtained as a result of reflection of a transmission ultrasonic wave. The reception optical mechanism transmits, during or after welding operation, the reception laser light generated from the reception laser light source to the surface of the object to be welded for irradiation while moving, together with the welding mechanism, relative to the object to be welded and collects laser light scattered reflected at the surface of the object to be welded.

Welding system and welding method

Systems and methods for material singulation. According to some embodiments, methods for material singulation may include applying a first laser output to the material, the first laser output causing a modification of a material property of the material when exposed to the first laser output; and applying a second laser output to the material that was exposed to the first laser output to cause singulation of the material in such a way that surfaces created by the singulation of the material are substantially free from defects.

Systems and processes that singulate materials

A laser maintenance apparatus including a laser system which includes an optical system for emitting, in a first irradiation condition, a generation laser beam for generating an ultrasonic wave in a portion of an object on which maintenance is to be performed, and including a laser source configured to generate and detect a detection laser beam which interacts with the ultrasonic wave generated by the laser light beam in the first condition The laser maintenance apparatus also includes a light transmitting device for transmitting laser light emitted from the laser system, a laser irradiation device for irradiating laser light transmitted by the light transmitting device to the object portion, and a transporting/scanning mechanism for transporting the light transmitting device and the laser irradiation device to a portion near the object portion, and scanning over an arbitrary range at the object portion

Fukashi c

Papers

Laser-based maintenance apparatus