An object is to provide a semiconductor device of which a manufacturing process is not complicated and by which cost can be suppressed, by forming a thin film transistor using an oxide semiconductor film typified by zinc oxide, and a manufacturing method thereof. For the semiconductor device, a gate electrode is formed over a substrate; a gate insulating film is formed covering the gate electrode; an oxide semiconductor film is formed over the gate insulating film; and a first conductive film and a second conductive film are formed over the oxide semiconductor film. The oxide semiconductor film has at least a crystallized region in a channel region.

Semiconductor device, and manufacturing method thereof

A semiconductor chip having contacts on the periphery of its top surface is provided with an interposer overlying the central portion of the top surface. Peripheral contact leads extend inwardly from the peripheral contacts to central terminals on the interposer. The terminals on the interposer may be connected to a substrate using techniques commonly employed in surface mounting of electrical devices, such as solder bonding. The leads, and preferably the interposer, are flexible so that the terminals are movable with respect to the contacts on the chip, to compensate for differential thermal expansion of the chip and substrate. The terminals on the interposer may be disposed in an area array having terminals disposed at substantially equal spacings throughout the area of the interposer, thus providing substantial distances between the terminals while accommodating all of the terminals in an area approximately the same size as the area of the chip itself. The interposer may be provided with a compliant layer disposed between the terminals and the chip to permit slight vertical movement of the terminals towards the chip during testing operations. The chip and interposer assembly may be electrically tested prior to assembly to the substrate. A compliant layer disposed between the terminals and the chip permits slight vertical movement of the terminals towards the chip during testing operations, in which the terminals on the interposer are engaged with an assembly of test probes. The entire assembly is compact.

Semiconductor chip assemblies with fan-in leads

A semiconductor chip assembly is mounted to contact pads in a compact area array. An interposer is disposed between the chip and the substrate. The contacts on the chip are connected to terminals on the interposer by flexible leads extending through apertures in the interposer. The terminals on the interposer in turn are bonded to the contact pads on the substrate. Flexibility of the leads permits relative movement of the contacts on the chip relative to the terminals and the contact pads of the substrate and hence relieves the stresses caused by differential thermal expansion. The arrangement provides a compact structure similar to that achieved through flip-chip bonding, but with markedly increased resistance to thermal cycling damage.

Semiconductor chip assemblies having interposer and flexible lead

A microelectronic package including a microelectronic die having through silicon vias extending through a back surface thereof, which allows both an active surface and the back surface of the microelectronic die to have power, ground, and/or input/output signals connected to a flexible substrate. The flexible substrate may further connected to an external substrate through at least one external contact.

Through silicon via, folded flex microelectronic package

A microelectronic package includes a microelectronic element having faces and contacts, the microelectronic element having an outer perimeter, and a substrate overlying and spaced from a first face of the microelectronic element, whereby an outer region of the substrate extends beyond the outer perimeter of the microelectronic element. The microelectronic package includes a plurality of etched conductive posts exposed at a surface of the substrate and being electrically interconnected with the microelectronic element, whereby at least one of the etched conductive posts is disposed in the outer region of the substrate. The package includes an encapsulating mold material in contact with the microelectronic element and overlying the outer region of the substrate, the encapsulating mold material extending outside of the etched conductive posts for defining an outermost edge of the microelectronic package.

Microelectronic packages and methods therefor

A semiconductor component includes a semiconductor chip ( 341, 502, 601, 701, 1101, 1410, 1501 ) having first and second surfaces opposite each other, a semiconductor device ( 301 ) in the semiconductor chip ( 341, 502, 601, 701, 1101, 1410, 1501 ), and a flexible substrate ( 120, 401, 510, 610, 710, 1000, 1050, 1300, 1401, 1510, 1520 ) packaging the semiconductor chip ( 341, 502, 601, 701, 1101, 1410, 1501 ).

Flexible substrate for packaging a semiconductor component

A semiconductor chip is flip chip bonded to a substrate having a cavity or a through hole formed therein. The cavity or through hole is preferably large enough to substantially remove the narrow gap which is formed between the portion of the substrate which does not have the cavity or through hole formed therein. This allows for use of mold processes to encapsulate and underfill the semiconductor chip and for line of sight cleaning of the semiconductor chip after bonding.

Semiconductor chip bonded to a substrate and method of making

A method for making moisture resistant semiconductor devices having organic substrates targets each of the potentially critical interfaces within a semiconductor device having the potential for delamination and cracking. An organic substrate (110) is designed to include a solid pad (116) having a chemically created oxide layer (118) formed thereon. A silicone-based die attach material (108) is dispensed and gelled very soon after dispensing to prevent excessive bleed. A semiconductor die (102) is mounted to the substrate after undergoing a cleaning operation to remove contaminants from the backside of the die. Prior to molding compound encapsulation and subsequent to die attach material cure, the substrate is cleaned to improve adhesion to the die attach material fillet (122). In practicing these operations, the following interfaces are targeted and their adhesion characteristics are improved: die attach material to die pad; die attach material to die; molding compound to die pad; and molding compound to die attach material.

Method for making a moisture resistant semiconductor device having an organic substrate

A semiconductor package (10) wherein a semiconductor die (12) is disposed in packaging material (34) and electrically coupled to leads (26) having portions (32) extending from the packaging material (34). The portions (32) of the leads (26) that extend from the packaging material (34) are adhered to the outside of the packaging material (34) and release therefrom when subjected to a predetermined amount of thermal stress. The invention disclosed herein allows consistent alignment of flexible leads (26) while adequately reducing stress caused by the differing coefficients of thermal expansion of the semiconductor package (10) and a printed circuit or the like on which the package is mounted.

Semiconductor package having leads that break-away from supports

A molded semiconductor package having a flagless leadframe (22) wherein a semiconductor die (10) is disposed in or above a die opening (20) of a leadframe (22). This allows for thin, symmetrical packages and packages having a minimum number of material interfaces to be manufactured because no leadframe flags and minimal die bond material are employed. The present invention further includes guard rings (34) to protect high stress areas of the semiconductor die (10) from damage and heat spreaders (46) to more effectively spread heat dissipated by the semiconductor die (10).

George W. Hawkins

Papers

Flexible substrate for packaging a semiconductor component

Semiconductor chip bonded to a substrate and method of making

Method for making a moisture resistant semiconductor device having an organic substrate

Semiconductor package having leads that break-away from supports

Flagless semiconductor package