A probe card assembly includes a probe card, a space transformer having resilient contact structures (probe elements) mounted directly to (i.e., without the need for additional connecting wires or the like) and extending from terminals on a surface thereof, and an interposer disposed between the space transformer and the probe card. The space transformer and interposer are “stacked up” so that the orientation of the space transformer, hence the orientation of the tips of the probe elements, can be adjusted without changing the orientation of the probe card. Suitable mechanisms for adjusting the orientation of the space transformer, and for determining what adjustments to make, are disclosed. The interposer has resilient contact structures extending from both the top and bottom surfaces thereof, and ensures that electrical connections are maintained between the space transformer and the probe card throughout the space transformer's range of adjustment, by virtue of the interposer's inherent compliance. Multiple die sites on a semiconductor wafer are readily probed using the disclosed techniques, and the probe elements can be arranged to optimize probing of an entire wafer. Composite interconnection elements having a relatively soft core overcoated by a relatively hard shell, as the resilient contact structures are described.

Probe card assembly and kit, and methods of making same

In a probe card assembly, a series of probe elements can be arrayed on a silicon space transformer. The silicon space transformer can be fabricated with an array of primary contacts in a very tight pitch, comparable to the pitch of a semiconductor device. One preferred primary contact is a resilient spring contact. Conductive elements in the space transformer are routed to second contacts at a more relaxed pitch. In one preferred embodiment, the second contacts are suitable for directly attaching a ribbon cable, which in turn can be connected to provide selective connection to each primary contact. The silicon space transformer is mounted in a fixture that provides for resilient connection to a wafer or device to be tested. This fixture can be adjusted to planarize the primary contacts with the plane of a support probe card board.

Probe card assembly

Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of cantilever-like probe structures. Some embodiments are directed to methods for fabricating such cantilever structures. In some embodiments, for example, cantilever probes have extended base structures, slide in mounting structures, multi-beam configurations, offset bonding locations to allow closer positioning of adjacent probes, compliant elements with tensional configurations, improved over travel, improved compliance, improved scrubbing capability, and/or the like.

Cantilever microprobes for contacting electronic components and methods for making such probes

Spring contact elements are fabricated by depositing at least one layer of metallic material into openings defined on a sacrificial substrate. The openings may be within the surface of the substrate, or in one or more layers deposited on the surface of the sacrificial substrate. Each spring contact element has a base end portion, a contact end portion, and a central body portion. The contact end portion is offset in the z-axis (at a different height) than the central body portion. The base end portion is preferably offset in an opposite direction along the z-axis from the central body portion. In this manner, a plurality of spring contact elements are fabricated in a prescribed spatial relationship with one another on the sacrificial substrate. The spring contact elements are suitably mounted by their base end portions to corresponding terminals on an electronic component, such as a space transformer or a semiconductor device, whereupon the sacrificial substrate is removed so that the contact ends of the spring contact elements extend above the surface of the electronic component. In an exemplary use, the spring contact elements are thereby disposed on a space transformer component of a probe card assembly so that their contact ends effect pressure connections to corresponding terminals on another electronic component, for the purpose of probing the electronic component.

Microelectronic contact structure, and method of making same.

An elongate, columnar micro-mechanical structure disposed along a central longitudinal axis; the structure is made up of laminated structural layers, each comprised of a structural material. The layers define a substantially rigid base portion at a proximal end of the structure, a resilient intermediate portion extending from the base portion along the central axis, and a contact tip extending from the resilient portion at a distal end of the structure. The resilient portion of the contact structure is comprised of resilient arms defined in the layers. Opposite ends of the resilient arms may be angularly offset with respect to one another around the central axis. Accordingly, when the contact structure is compressed in an axial direction, the contact tip will rotate around the central axis, while the base remains fixed, providing beneficial wiping action to the contact tip.

Microelectronic contact structure

The contactor is used for an electronic tester for testing of electronic items such as printed circuit boards, integrated circuits or the like. It has at least one resilient contact pin which has a piston member and a spring. The piston member and the spring are formed in a single piece from a single piece of metal sheet.

Contactor for an electronic tester

A resilient contact pin for contacting electrical or electronic items to be tested, such as conductor plates, printed circuit boards or the like, the resilient contact pin being electrically conductive and intended for mounting on a testing arrangement, includes a straight cylindrical member including a metallic tube constituted by a punched and bent sheetmetal part. A contact member includes a piston accommodated in the metallic tube for axial sliding and a frontward end portion projecting out of the metallic tube and serving for contacting the item to be tested. A spring is accommodated in the metallic tube and urged the contact member in a frontward direction relative to the metallic tube. There is further provided at least one lug constituted by an integral region of a circumferential wall of the metallic tube and extending into the interior of the metallic tube to constitute an abutment which limits the extent of the frontward movement of the piston of the contact member.

Resilient contact pin

A resilient contact pin for contacting electrical or electronic items to be tested, such as conductor plates, printed circuit boards or the like, the resilient contact pin being electrically conductive and intended for mounting on a testing arrangement, includes a straight cylindrical member including a metallic tube constituted by a punched and bent sheet metal part. A contact member includes a piston accommodated in the metallic tube for axial sliding and a frontward end portion projecting out of the metallic tube and serving for contacting the item to be tested. A spring is accommodated in the metallic tube and urges the contact member in a frontward direction relative to the metallic tube. There is further provided at least one lug constituted by an integral region of a circumferential wall of the metallic tube and extending into the interior of the metallic tube to constitute an abutment which limits the extent of the frontward movement of the piston of the contact member.

Resilient contact pin and a method of its manufacture

Federkontaktstift zum Kontaktieren von zu prufenden Pruflingen, wie Leiterplatten oder dergleichen. Er weist ein Zylinderglied und ein federbelastetes Kontaktglied auf. Das Zylinderglied weist mindestens einen Lappen auf, der einen Anschlag fur die Ruhestellung des Kontaktgliedes bildet und das Rohr des Zylindergliedes ist aus einem gestanzten Blechstuck gebogen.

Gustav Kruger

Papers

Contactor for an electronic tester

Resilient contact pin

Resilient contact pin and a method of its manufacture

Spring test probe and process for manufacturing it