We first provide an overview of 3-D shape measurement us- ing various optical methods. Then we focus on structured light tech- niques where various optical configurations, image acquisition tech- niques, data postprocessing and analysis methods and advantages and limitations are presented. Several industrial application examples are presented. Important areas requiring further R&D are discussed. Finally, a comprehensive bibliography on 3-D shape measurement is included, although it is not intended to be exhaustive. © 2000 Society of Photo-Optical Instrumentation Engineers. (S0091-3286(00)00101-X)

Overview of three-dimensional shape measurement using optical methods

We review 20 years of development in the field of 3-D laser imaging. An overview of 3-D digitizing techniques is presented with an emphasis on commercial techniques and systems currently available. It covers some of the most important methods that have been developed, both at the National Research Council of Canada (NRC) and elsewhere, with a focus on commercial systems that are considered good representations of the key technologies that have survived the test of years. © 2004 SPIE and IS&T.

Review of 20 years of range sensor development

A microscopy and/or lithography system uses a comparatively low-resolution image projection system, which has a very small numerical aperture but large image field, in conjunction with a microlens array comprising miniature lens elements, each of which has a large numerical aperture but very small field. The projection system contains a small aperture stop which is imaged by the microlenses onto an array of diffraction-limited microspots on the microscope sample or printing surface at the microlens focal point positions, and the surface is scanned to build up a complete raster image from the focal point array. The system design thus circumvents the tradeoff between image resolution and field size which is the source of much of the complexity and expense of conventional wide-field, high-NA microscopy and microlithography systems. The system makes possible flat field, distortion-free imaging, with accurate overlay, focus, and warp compensation, over very large image fields (larger than the practical limits of conventional imaging means). In one embodiment it would use a Digital Micromirror Device as the image source, potentially eliminating the need for photomasks in semiconductor manufacture.

Microlens scanner for microlithography and wide-field confocal microscopy

This tutorial reviews various noncontact optical sensing techniques that can be used to measure distances to objects, and related parameters such as displacements, surface profiles, velocities and vibrations. The techniques that are discussed and compared include intensity-based sensing, triangulation, time-of-flight sensing, confocal sensing, Doppler sensing, and various kinds of interferometric sensing with both high- and low-coherence sources.

Optical methods for distance and displacement measurements

An endoscope-compatible, submicrometer-resolution scanning confocal microscopy imaging system is presented. This approach, spectrally encoded confocal microscopy (SECM), uses a quasi-monochromatic light source and a transmission diffraction grating to detect the reflectivity simultaneously at multiple points along a transverse line within the sample. Since this method does not require fast spatial scanning within the probe, the equipment can be miniaturized and incorporated into a catheter or endoscope. Confocal images of an electron microscope grid were acquired with SECM to demonstrate the feasibility of this technique.

Spectrally encoded confocal microscopy.

In the image of a confocal microscope, only those parts of an object appear bright that are located in the focal plane of the objective. Because of an axial chromatic aberration deliberately introduced into the microscope objective, the location of the focal plane depends on the wavelength used. By using a white-light source and examining an object with a depth variation less than the axial range of the chromatic focus, we find that all parts of the object appear sharp and bright in the image, but according to its height they appear in different colors. A camera with black-and-white film sequentially combines, with three selected chromatic filters, intensity and tone of color of each object point. For each tone of color one can assign a height by using a calibration curve. This assignment could be made unequivocal by the selection of filters with adequate chromatic transmission.

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Three-dimensional image sensing by chromatic confocal microscopy

Scanning confocal microscopy is now well developed and applied. As an alternative to a laser spot to be scanned, parallel processing can be obtained when a two-dimensional structure is moved through the focal plane and a series of image sections is recorded. Surface topography is determined by analysis of the normalized intensity of the appropriate image points, i.e., a search of the intensity maximum leads to surface coordinates. With a high numerical aperture of the optical system, the half-width of I(z) is small, and the topography can be calculated with high accuracy. But with a high numerical aperture, only small object fields can be reproduced. As an alternative to the Nipkow disk for parallel processing, high-numerical-aperture microlenses are combined in an array. The reproducible object field is then limited by the size of the array and the number of lens and detector elements.

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Hans-Martin Uhde

Papers

Three-dimensional image sensing by chromatic confocal microscopy

Three-dimensional analysis by a microlens-array confocal arrangement