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Showing papers by "Hany Hassanin published in 2013"


Journal ArticleDOI
TL;DR: In this article, the effect of particle size on the properties of the slips and sintered micro parts has been investigated, and high quality micro parts with a density of 98.5%, shrinkage of 20.9%, hardness of 14.65 GPa, flexural strength of 509 MPa, and roughness of 54.38 nm have been successfully obtained.

29 citations


Journal ArticleDOI
TL;DR: In this article, the surface roughness and geometrical characterization of soft lithography technique for the fabrication of ceramic micro components were studied and a comparative study was performed for the optimization process.
Abstract: Ceramic micro fabrication using soft lithography is a well-known technique used to pattern high-aspect-ratio microstructures. The quality of the pattern highly relies on the quality of the moulds. This paper describes the surface roughness and geometrical characterization of soft lithography technique for the fabrication of ceramic micro components. Effects of patterning materials and methods on the produced geometry, repeatability and surface roughness were studied and a comparative study was performed for the optimization process. UV lithography of BPR100 and SU-8 and deep reactive ion etching are the methods for fabricating the master mould. In addition, polydimethylsiloxane and Dragon Skin elastomeric have been used in the fabrication of the soft moulds. Mould geometry was inspected using SEM images while surface roughness was measured using stereo imaging. The results show that the maximum obtained thicknesses are 1,000, 250 and 500 μm for SU-8, BPR100 and DRIE moulds. In addition, their surface roughness values are higher than the SU-8. On the other hand, Dragon Skin shows demoulding problems despite it has smoother surface than PDMS mould.

9 citations


Journal ArticleDOI
TL;DR: In this paper, the effects of particle size on soft lithography process, green bodies, and sintered characteristics were investigated, including process parameters affecting homogeneous and smooth surface.
Abstract: Alumina micro parts were fabricated using powders in particle sizes of 1 μm, 2.0 μm, and 12.0 μm. The effects of particle size on soft lithography process, green bodies, and sintered characteristics were investigated, including process parameters affecting homogeneous and smooth surface. The effects of particle size were analyzed through suspensions, green, and sintered properties. It was found that the stability of suspensions, sintered density, Vickers micro hardness, surface roughness and edges resolution are significantly improved with the decrease in particle size. On the other hand, suspension viscosity, green density and shrinkage are degraded with the use of finer particles.

6 citations