A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes a first radiation dose detector and a second radiation dose detector, each detector comprising a secondary electron emission surface configured to receive a radiation flux and to emit secondary electrons due to the receipt of the radiation flux, the first radiation dose detector located upstream with respect to the second radiation dose detector viewed with respect to a direction of radiation transmission, and a meter, connected to each detector, to detect a current or voltage resulting from the secondary electron emission from the respective electron emission surface.

Lithographic apparatus, and device manufacturing method

A projection exposure apparatus, which has a projection optical system and exposes a substrate through the projection optical system and a liquid, while a gap between the projection optical system and the substrate is filled with the liquid. The apparatus includes a light-receiving element configured to detect light incident thereon through the projection optical system and the liquid, a vessel in which the light-receiving element is arranged, and a fluoroplastic filling a space within the vessel to cover the light-receiving element.

Projection exposure apparatus, device manufacturing method, and sensor unit

A scintillator comprising a matrix material body and nano-material scintillator media carried by the matrix body One embodiment provides a scintillator apparatus comprising a matrix material body with nano-material scintillator media carried by the matrix body In one embodiment the nano-material scintillator media is quantum dots In another embodiment the nano-material scintillator media is nanowires

Scintillator with a matrix material body carrying nano-material scintillator media

A scintillation detector comprising nano-scale particles of a scintillation compound embedded in a plastic matrix is provided. The nano-scale particles may be made from metal oxides, metal oxyhalides, metal oxysulfides, or metal halides. Methods are provided for preparing the nano-scale particles. The particles may be coated with organic compounds or polymers prior to incorporation in the plastic matrix. A technique for matching the refractive index of the plastic matrix with the nano-scale particles by incorporating nano-scale particles of titanium dioxide is also provided. The scintillator may be coupled with one or more photodetectors to form a scintillation detection system. The scintillation detection system may be adapted for use in X-ray and radiation imaging devices, such as digital X-ray imaging, mammography, CT, PET, or SPECT, or may be used in radiation security detectors or subterranean radiation detectors.

Polymeric composite scintillators and method for making same

A CT scanner comprising a stator and a rotor having an axis of rotation mounted to the stator so that the rotor is rotatable about the axis of rotation comprising: an X-ray source mounted to the rotor, said X-ray source having a focal spot from which X-rays emanate; an X-ray detector array comprising a matrix of rows and columns of X-ray detectors; anti-scattering (AS) material for absorbing X-rays positioned between columns of the X-ray detectors; and anti-scattering (AS) material for absorbing X-rays positioned between rows of the X-ray detectors, whereby the AS material is located between every other row and/or column of detectors, respectively. Furthermore, the thickness and/or height of the foils between rows may be different from the thickness and/or height of the foils between columns.

Anti-scattering x-ray shielding for ct scanners

An X-ray detector module ( 1 ) is provided, in which a preferably metallic carrier ( 3 ) forms tubular cells ( 4 ) in which there is provided a mixture of a binder ( 7 ) and scintillator particles ( 6 ). The absorption of X-rays by the scintillator particles ( 6 ) gives rise to the emission of light of a longer wavelength (λ 1 , λ 2 ) that can be detected by a detector ( 5 ) arranged at the far end of the cells ( 4 ). In order to keep the light yield as high as possible, a difference of less than 20% is pursued between the refractive indices of the binder ( 7 ) and the scintillator particles ( 6 ) and/or nano-crystalline scintillator particles ( 6 ) of a size of between 1 and 100 nm are used. Preferably, the cell walls ( 3, 3′ ) are extended in the direction of incidence of the X-rays in order to form an anti-scatter grid above the detector.

X-ray detector module

PROBLEM TO BE SOLVED: To provide an X-ray detection module 1 in which a tubular cell 4 provided within a mixture of a coupler 7 and a scintillator particles 6 is formed preferably by a metal carrier 3. SOLUTION: The absorption of X-rays by the scintillator particle 6 causes emission of light with wavelengths λ1 and λ2 that are longer than the wavelength which can be detected by a detector 5 positioned at a distal end of the cell 4. In order to keep a light yield as high as possible, a difference in refractive index between the coupler 7 and the scintillator particle 6 must be less than 20% and/or a nanocrystal scintillator particle 6 that is 1 to 100 nanometers in size is used. The cell walls 3 and 3' extend in the direction of incidence of X-rays in order to form a scattered radiation removal grid over the detector.

Herfried c o Philips Corp. Intell. Pro Wieczorek

Papers

X-ray detector module

X-ray detection module