A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes a first radiation dose detector and a second radiation dose detector, each detector comprising a secondary electron emission surface configured to receive a radiation flux and to emit secondary electrons due to the receipt of the radiation flux, the first radiation dose detector located upstream with respect to the second radiation dose detector viewed with respect to a direction of radiation transmission, and a meter, connected to each detector, to detect a current or voltage resulting from the secondary electron emission from the respective electron emission surface.

Lithographic apparatus, and device manufacturing method

A method is provided for modifying an image. The method comprises displaying an image, the image comprising a portion of an object; and determining if an edge of the object is in a location within the portion. The method further comprises detecting movement, in a member direction, of an operating member with respect to the edge. The method still further comprises moving, if the edge is not in the location, the object in an object direction corresponding to the detected movement; and modifying, if the edge is in the location, the image in response to the detected movement, the modified image comprising the edge in the location.

Information processing apparatus, information processing method and program

A memory cell array has a first and a second storage area. The first storage area has a memory elements selected by an address signal. The second storage area has a memory elements selected by a control signal. A control circuit has a fuse element. When the fuse element has been blown, the control circuit inhibits at least one of writing and erasing from being done on the second storage area.

Nonvolatile Semiconductor Memory Device

An immersion lithography system for semiconductor manufacturing provides a lens assembly that moves relative to a wafer surface and includes a nozzle and drain assembly that is coupled to, and moves along, the lens assembly. The nozzle and drain assemblies may be disposed circumferentially opposite each other about the lens or an annular ring may be provided that surrounds the lens and includes a plurality of selectable alternating nozzles and drains. The nozzle and drain assemblies may rotatably surround the lens. At least a portion of the wafer being patterned is immersed in a liquid provided by the nozzle assembly and a flow direction is controlled by manipulating the nozzle and drain assemblies. Flow direction may be advantageously directed outwardly to reduce particulate contamination.

Apparatus and method for immersion lithography

A data storage and retrieval device and method is disclosed. The device includes at least one magnetic storage medium configured to store target data and at least one re-configurable logic device comprising an FPGA coupled to the at least one magnetic storage medium and configured to read a continuous stream of target data therefrom, having been configured with a template or as otherwise desired to fit the type of search and data being searched. The re-configurable logic device is configured to receive at least one search inquiry in the form of a data key and to determine a match between the data key and the target data as it is being read from the at least one magnetic storage medium. This device and method can perform a variety of searches on the target data including without limitation exact and approximate match searches, sequence match searches, image match searches and data reduction searches. This device and method may be provided as part of a stand-alone computer system, embodied in a network attached storage device, or can otherwise be provided as part of a computer LAN or WAN. In addition to performing search and data reduction operations, this device may also be used to perform a variety of other processing operations including encryption, decryption, compression, decompression, and combinations thereof.

Intelligent data storage and processing using fpga devices

An information processing system includes a first information processing apparatus and a second information processing apparatus arranged separate from the first information processing apparatus and capable of exchanging a signal with the first information processing apparatus. The first information processing apparatus includes a first key generator for generating a first key, and a first encrypting unit for encrypting data using the first key generated by the first key generator to generate first encrypted information. The second information processing apparatus includes a second key storage unit for storing a second key, and a second encrypting unit for encrypting the first key using the second key stored in the second storage unit to generate second encrypted information. The first information processing apparatus further includes a correlation storage unit for storing the first encrypted information generated by the first encrypting unit and the second encrypted information generated by the second encrypting unit, the first encrypted information being correlated with the second encrypted information.

Information processing system having function of securely protecting confidential information

According to one embodiment, a secondary battery device includes a secondary battery cell (14), a case (12) configured to accommodate the secondary battery cell, and foam coating layers (40, 50) sandwiched between an outer surface of the secondary battery cell and an inner surface of the case and configured to hold the secondary battery cell.

Secondary battery device

According to one embodiment, a battery unit includes a first cell unit, a second cell unit and a third cell unit arranged adjacent to the first cell unit, respectively. Each cell unit includes a plurality of secondary battery cells, and the respective secondary battery cells are formed of a main body of a substantially rectangular solid shape and a pair of first and second electrodes of different polarities each other pulled out from one end of the main body. A first bus bar connects the first electrodes of the first cell unit and the second electrodes of the second cell unit in a first line, and a second bus bar connects the second electrodes of the first cell unit and the first electrodes of the third cell unit in a second line.

Battery unit and secondary battery assembly equipped with the battery unit

PROBLEM TO BE SOLVED: To realize high precision exposure by preventing the contamination of a lens due to liquid in a liquid immersion aligner. SOLUTION: In the aligner 1 for performing exposure in a state where liquid L is filled between a light exit end 2a of an optical lens 2 and a wafer W as an exposure object; there are provided, below the light exit end 2a freely to go forward and backward, a cleaning nozzle 10 for injecting a cleaning solution LC toward the light exit end 2a of the optical lens 2, a gas nozzle 11 for injecting gas toward the light exit end 2a, and a brush 12 for removing the contamination of the light exit end 2a. COPYRIGHT: (C)2005,JPO&NCIPI

Aligner and manufacturing method of semiconductor device

An encryption/decryption unit includes a first data encryption/decryption section for performing an encryption or decryption process, a first data substitution section for performing data substitution of an output from the first encryption/decryption section according to a predetermined permutation table, a second data encryption/decryption section for performing an encryption or decryption process for an output from the first data substitution section, a second data substitution section for performing data substitution of an output from the second data encryption/decryption section according to a predetermined permutation table, and a third data encryption/decryption section for performing an encryption or decryption process for an output from the second data substitution section.

Hideo Shimizu

Papers

Information processing system having function of securely protecting confidential information

Secondary battery device

Battery unit and secondary battery assembly equipped with the battery unit

Aligner and manufacturing method of semiconductor device

Encryption/decryption unit and storage medium