Hongji Pu

TL;DR: In this article, a highly stable motion with orthogonally alternating electric field is established to build the relationship between spatial displacement and time standards, and displacement is measured by counting the time pulses that serve as measurement standards.

TL;DR: Three features of time-grating capacitive displacement sensors that reduce the required manufacturing precision while maintaining high-accuracy measurements are considered, which is promising for transforming the presently challenging technology of long-range displacement measurements with nanometer-scale accuracy into a conventional technology.

TL;DR: In this article, the authors investigated the sensing mechanism of a novel capacitive nanometer sensor based on the time grating approach, which indicates that the measured displacement of the object is proportional to the phase shift of the output signal.

TL;DR: It is difficult to achieve long measurement range with high precision in displacement measurement, a new nanometer displacement sensor, named time grating, is proposed to tackle this problem and the relationships between the error characteristics and the model parameters are obtained.

TL;DR: In this paper, a single row type sensor was proposed to achieve fine displacement measurement, which combines the two electrode rows of a previously proposed double-row type capacitive displacement sensor based on time grating into one row.