The present invention relates to an acidic ozone solution having a high concentration of ozone, a method for preparing the solution by injecting ozone into an acid, and a method for cleaning single crystal silicon wafers using the solution.

An acidic ozone solution having a high ozone content, a method for preparing the solution, and a cleaning method using the solution

Methods of using ozone have been developed which sterilize instruments and medical wastes, oxidize organics found in wastewater, clean laundry, break down contaminants in soil into a form more readily digested by microbes, kill microorganisms present in food products, and destroy toxins present in food products. The preferred methods for killing microorganisms and destroying toxins use pressurized, humidified, and concentrated ozone produced by an electrochemical cell.

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Electrochemical production of ozone and hydrogen peroxide

Method and apparatus for treating the atmosphere to lower the concentration of pollutants therein in which ambient air is passed into operative contact with a stationary substrate such as an automobile at rest, a billboard, an air conditioning unit, a transportation tunnel and the like, the stationary substrate having at least one ambient air contacting surface having a pollutant treating composition thereon

Method and apparatus for treating the atmosphere

A system for increasing the quantity of a gas, e.g., ozone, dissolved in a liquid, e.g., ultrapure deionized water, is provided. Generally, the system provided by the present invention includes a pressurized vessel and an outlet coupled to the pressurized vessel adapted to dispense a stream of the admixture including the liquid and the dissolved gas under sufficiently gentle conditions such that the dispensed admixture comprises an increased quantity of dissolved gas relative to admixture produced and dispensed by conventional methods. Thus, the system of the present invention is able to provide, e.g., ozonated water, continuously, efficiently and without cooling, and thus provides a simple, cost efficient system capable of producing high concentration ozonated water.

Method to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized

The present invention provides an electrolytic cell, which can efficiently produce charged water having an excellent performance of improving surface cleaning or treatment of an object, e.g., semiconductor, glass, or resin and of cleaning and sterilizing medical device. The electrolytic cell of the present invention is for producing charged anode water suitable for surface cleaning or treatment, including the cathode chamber 41 and anode chamber 50 , fluorinated cation-exchange membrane 46 provided to separate these chambers from each other, cathode 44 closely attach to the cation-exchange membrane 45 on the side facing the cathode chamber 41 , and middle chamber 48 filled with the cation-exchange resin 46 , provided on the other side of the cation-exchange membrane 46 , the cation-exchange resin 46 being arranged in such a way to come into contact with the fluorinated cation-exchange membrane 45 , wherein the feed water is passed into the middle chamber 48 and passed thorough the anode chamber 50 to be recovered as the charged anode water.

Electrolytic cell for producing charged anode water suitable for surface cleaning or treatment, and method for producing the same and use of the same

A method and apparatus for water electrolysis is described, using an electrolytic cell comprising an anode compartment, a cathode compartment, and a diaphragm separating the anode and cathode compartments, comprising the steps of electrolyzing water to evolve oxygen or an ozone-containing oxygen gas in the anode compartment and hydrogen in the cathode compartment, thereby resulting in a net transfer of electrolyte from the anode compartment to the cathode compartment through the diaphragm, and recycling electrolyte from the cathode compartment to the anode compartment.

Method for electrolyzing water

An electrolytic ozone generator is described, which comprises a feed tank in which water is stored, an ion-exchange column connected to the feed tank, a pump for feeding the stored water in the feed tank to the ion-exchange column, an electrolytic cell connected to the ion-exchange column and containing a solid electrolyte which is an ion-exchange membrane, an anode disposed tightly on one side of the solid electrolyte, and a cathode disposed tightly on the other side of the solid electrolyte, an electromagnetic valve connected to and disposed between the ion-exchange column and the electrolytic cell, and a hydrogen-separating column connected to the electrolytic cell and for separating hydrogen from a gas-liquid mixture sent from the electrolytic cell and circulating the resulting water to the feed tank, and in which the liquid level of the anolyte in the electrolytic cell is sensed, and, in a case wherein said liquid level is below a predetermined value, ion-exchanged water is fed from the ion-exchange column to the electrolytic cell by controlling the electromagnetic valve.

Electrolytic ozone generator

A method of water electrolysis for producing acidic water and alkaline water is disclosed, which is effective in preventing the dissolution of electrode material in the acidic water, etc. attributable to a reverse current flowing in a power supply cutoff state and also in preventing electrode deactivation caused by the electrode material dissolution. This enables the electrolytic cell to be operated stably over a long period of time to yield high-purity acidic and alkaline waters. An electrolytic cell 1 partitioned into an anode chamber and a cathode chamber with a cation-exchange membrane 2 as a solid electrolyte is used to electrolytically produce acidic water and alkaline water. A voltage of 1.2 V or higher and/or a current of 20 mA/dm 2 or higher is applied between the anode 7 and the cathode 8 when the electrolytic cell is in a power supply cutoff state.

Method of water electrolysis

The present invention is directed toward an electrolytic ozonier for treating ozone-containing waste gas and a method of treating ozone-containing waste gas using the ozonier, wherein the method includes evolving oxygen and ozone in an anode compartment of an electrolytic cell by electrolysis of water while evolving hydrogen in a cathode compartment; directing the evolved hydrogen into a waste gas treating section that contains a waste gas decomposition catalyst so as to convert the hydrogen to a harmless form by means of the catalyst; bringing the oxygen and ozone into contact with a medium to be treated in an ozone contactor so as to treat the medium; and subsequently directing waste gas containing oxygen and ozone produced as a result of treatment of the medium into the waste gas treating section where they are brought into either direct or indirect contact with the catalyst so that the ozone in the waste gas is converted into a harmless form.

Electrolytic ozonizer and method of decomposing ozone-containing waste gas using said ozonizer

A method and apparatus for water treatment is described, using electrolytic zone, which comprises electrolyzing water to generate an ozone-containing gas in the anode compartment of an electrolytic cell, separating the ozone-containing gas from the anolyte, and contacting the separated ozone-containing gas with the water to be treated said water to be treated being different than the water for electrolysis.

Isao Sawamoto

Papers

Method for electrolyzing water

Electrolytic ozone generator

Method of water electrolysis

Electrolytic ozonizer and method of decomposing ozone-containing waste gas using said ozonizer

Method and apparatus for treating water using electrolytic ozone