J
J. W. Ward
Publications - 2
Citations - 375
J. W. Ward is an academic researcher. The author has contributed to research in topics: Lens (optics) & Lithography. The author has an hindex of 2, co-authored 2 publications receiving 367 citations.
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A high‐intensity scanning ion probe with submicrometer spot size
TL;DR: In this article, a liquid metal gallium ion source was imaged by a unity-magnification single-gap accelerating lens with a postlens deflector to form a focused scanning probe.
Journal ArticleDOI
High-resolution, ion-beam processes for microstructure fabrication
TL;DR: In this article, the potentials of ionbeam lithography using masks and focused ion beams are discussed. And an ionbeam-transmission mask is described, and results are presented showing 1X replicated mask patterns with 0.6μm features that were exposed in PMMA resist by irradiating the mask with a conventional size 150kV proton beam.