J
Jiang Chen
Publications - 1
Citations - 7
Jiang Chen is an academic researcher. The author has contributed to research in topics: Photoresist & Nanolithography. The author has an hindex of 1, co-authored 1 publications receiving 7 citations.
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The Interdependence of Exposure and Development Conditions when Optimizing Low-Energy EBL for Nano-Scale Resolution
Mohammad Ali Mohammad,Taras Fito,Jiang Chen,Steven C. Buswell,Mirwais Aktary,Steven K. Dew,Maria Stepanova +6 more
TL;DR: Haffner et al. as mentioned in this paper proposed a detailed understanding of the molecular mechanisms involved in both the electron-resist interaction and in the polymer dissolution (development) stages of the nanolithography process.