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Jinchun Hu

Researcher at Tsinghua University

Publications -  103
Citations -  998

Jinchun Hu is an academic researcher from Tsinghua University. The author has contributed to research in topics: Interferometry & Adaptive filter. The author has an hindex of 14, co-authored 101 publications receiving 877 citations. Previous affiliations of Jinchun Hu include Nanjing University.

Papers
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Patent

Planar motor driven magnetic suspension coarse/micro motion integrated reticle stage

TL;DR: In this article, a planar motor driven magnetic suspension coarse/micro motion integrated reticle stage is presented, which consists of a coarse/minimally motion integrated Reticle stage moving table, a balance mass, a driving motor, a mask plate, a base, a vibration isolation system and a measurement system.
Proceedings ArticleDOI

Three-dimensional stage self-calibration: A general theory framework

TL;DR: In this article, a general self-calibration theory framework is presented for three-dimensional precision stages to determine the stage error using four measurement views of a cubic artifact on the 3D precision stage to provide the symmetry, transitivity and redundance.
Proceedings ArticleDOI

On-axis self-calibration of precision XYθ z metrology systems: An approach framework

TL;DR: The proposed scheme solve the XYθz self-calibration problem, and possesses special merits such as simplifying the mathematical processing for calculation of misalignment errors.
Patent

Heterodyne grating interferometer displacement measurement system

TL;DR: In this article, a heterodyne grating interferometer displacement measurement system, comprising a reading head (1), a measurement grating (2) and an electronic signal processing component (3), is presented.
Proceedings ArticleDOI

System Identification of UAV Based on EWC-LMS

TL;DR: In this paper, the authors applied EWC in the system identification of real self-developed UAV's takeoff motion, and compared the result of EWC-LMS with traditional LMS (least mean square) and TLS (total least square).