J
Jinchun Hu
Researcher at Tsinghua University
Publications - 103
Citations - 998
Jinchun Hu is an academic researcher from Tsinghua University. The author has contributed to research in topics: Interferometry & Adaptive filter. The author has an hindex of 14, co-authored 101 publications receiving 877 citations. Previous affiliations of Jinchun Hu include Nanjing University.
Papers
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Patent
Planar motor driven magnetic suspension coarse/micro motion integrated reticle stage
Ming Zhang,Yu Zhu,Zhi Fan,Cheng Rong,Kaiming Yang,Liu Zhao,Zhang Li,Qin Huichao,Zhao Yanpo,Tian Li,Ye Weinan,Zhang Jin,Wensheng Yin,Haihua Mu,Jinchun Hu +14 more
TL;DR: In this article, a planar motor driven magnetic suspension coarse/micro motion integrated reticle stage is presented, which consists of a coarse/minimally motion integrated Reticle stage moving table, a balance mass, a driving motor, a mask plate, a base, a vibration isolation system and a measurement system.
Proceedings ArticleDOI
Three-dimensional stage self-calibration: A general theory framework
Yu Zhu,Chuxiong Hu,Jinchun Hu +2 more
TL;DR: In this article, a general self-calibration theory framework is presented for three-dimensional precision stages to determine the stage error using four measurement views of a cubic artifact on the 3D precision stage to provide the symmetry, transitivity and redundance.
Proceedings ArticleDOI
On-axis self-calibration of precision XYθ z metrology systems: An approach framework
TL;DR: The proposed scheme solve the XYθz self-calibration problem, and possesses special merits such as simplifying the mathematical processing for calculation of misalignment errors.
Patent
Heterodyne grating interferometer displacement measurement system
Ming Zhang,Yu Zhu,Leijie Wang,Jinchun Hu,Longmin Chen,Kaiming Yang,Dengfeng Xu,Wensheng Yin,Haihua Mu +8 more
TL;DR: In this article, a heterodyne grating interferometer displacement measurement system, comprising a reading head (1), a measurement grating (2) and an electronic signal processing component (3), is presented.
Proceedings ArticleDOI
System Identification of UAV Based on EWC-LMS
TL;DR: In this paper, the authors applied EWC in the system identification of real self-developed UAV's takeoff motion, and compared the result of EWC-LMS with traditional LMS (least mean square) and TLS (total least square).