J
Jinchun Hu
Researcher at Tsinghua University
Publications - 103
Citations - 998
Jinchun Hu is an academic researcher from Tsinghua University. The author has contributed to research in topics: Interferometry & Adaptive filter. The author has an hindex of 14, co-authored 101 publications receiving 877 citations. Previous affiliations of Jinchun Hu include Nanjing University.
Papers
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Patent
Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space
TL;DR: In this paper, a two-dimensional, position-sensitive sensor-based system for positioning an object having six degrees of freedom in space, used for positioning of a silicon table and mask table of a lithography machine.
Book ChapterDOI
Information Theoretical Approach to Identification of Hybrid Systems
Li Pu,Jinchun Hu,Badong Chen +2 more
TL;DR: A noisy version of the algebraic geometric approach of identifying parameters of discrete-time linear hybrid system using MSE criteria and a stochastic information divergence gradient algorithm is derived for the identification problem of non-gaussian system.
Patent
Silicon wafer platform with anti-collision function
Yu Zhu,Ming Zhang,Liu Zhao,Kaiming Yang,Dengfeng Xu,Tian Li,Zhang Li,Qin Huichao,Wang Ping An,Wensheng Yin,Jinchun Hu,Haihua Mu +11 more
TL;DR: In this article, a silicon wafer platform with an anti-collision function is presented, which can be applied to a photo-etching machine dual-platform exchange system.
Patent
Method for measuring displacement of large-range moving platform
Ming Zhang,Yu Zhu,Hao Liu,Yi Jiang,Liu Zhao,Kaiming Yang,Jinchun Hu,Dengfeng Xu,Haihua Mu,Wensheng Yin +9 more
TL;DR: In this article, a method for measuring displacement of a large-range moving platform is proposed, which consists of arranging multiple beams of first measuring light parallel to one another and generated by an optical path distribution device and a position sensitive detector array in a certain manner, to ensure that at least one beam of first detecting light is detected by the detector array when a moving platform was at any position of a moving area; a detection head array capable of determining whether a light beam is shaded being used for auxiliary measurement of a position of the moving platform.
Proceedings ArticleDOI
Adaptive filtering for desired error distribution under minimum information divergence criterion
TL;DR: This work proposes a new notion of filtering (or estimation) in which the errorpsilas probability density function (PDF) is shaped into a desired one, and derives the associated stochastic gradient algorithm for the finite impulse response (FIR) filter.