K
Karl Opsomer
Researcher at Katholieke Universiteit Leuven
Publications - 92
Citations - 2528
Karl Opsomer is an academic researcher from Katholieke Universiteit Leuven. The author has contributed to research in topics: Atomic layer deposition & Germanide. The author has an hindex of 24, co-authored 88 publications receiving 2178 citations. Previous affiliations of Karl Opsomer include IMEC & Ghent University.
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Thermomechanical Properties of Nickel Silicide: Dependence on the Microstructure
TL;DR: In this paper, the grain orientation of a 120 nm polycrystalline NiSi film grown on single crystal silicon has been studied by means of electron diffraction, and the evaluation of the CTE tensor of the film in the wafer reference frame has been performed by weighted averaging the single grain contributions.