K
Kenneth C. Struven
Publications - 1
Citations - 87
Kenneth C. Struven is an academic researcher. The author has contributed to research in topics: Polishing & Wafer. The author has an hindex of 1, co-authored 1 publications receiving 87 citations.
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Floating subcarriers for wafer polishing apparatus
TL;DR: In this article, the benefits of single wafer polishing are achieved with the economies of multiple wafer plasming by adding the plurality of floating subcarriers to the conventional carrier.