K
Kensho Tokuda
Publications - 1
Citations - 16
Kensho Tokuda is an academic researcher. The author has contributed to research in topics: Signal processing & Signal. The author has an hindex of 1, co-authored 1 publications receiving 16 citations.
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Patent
Photomask inspecting device
Naomasa Shiraishi,Kensho Tokuda +1 more
TL;DR: In this paper, a photomask provided with a phase member was inspected by optimizing the aperture stop of an illuminating optical system and the aperture-stop of a photoelectric detection means, and a remarkable difference was found out between both of them.