K
Kruit Peter
Researcher at Alcatel-Lucent
Publications - 1
Citations - 36
Kruit Peter is an academic researcher from Alcatel-Lucent. The author has contributed to research in topics: Laser beam quality & Beam diameter. The author has an hindex of 1, co-authored 1 publications receiving 36 citations.
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Patent
Illumination system for electron beam lithography tool
TL;DR: In this article, a method and apparatus for controlling beam emittance by placing a quadrupole lens array in a drift space of an illumination system component was proposed, which can permit independent control of beam current and beam emission, which is beneficial in a Scalpel illumination system.