Optical modulators are at the heart of optical communication links. Ideally, they should feature low loss, low drive voltage, large bandwidth, high linearity, compact footprint and low manufacturing cost. Unfortunately, these criteria have been achieved only on separate occasions. Based on a silicon and lithium niobate hybrid integration platform, we demonstrate Mach–Zehnder modulators that simultaneously fulfil these criteria. The presented device exhibits an insertion loss of 2.5 dB, voltage–length product of 2.2 V cm in single-drive push–pull operation, high linearity, electro-optic bandwidth of at least 70 GHz and modulation rates up to 112 Gbit s−1. The high-performance modulator is realized by seamless integration of a high-contrast waveguide based on lithium niobate—a popular modulator material—with compact, low-loss silicon circuitry. The hybrid platform demonstrated here allows for the combination of ‘best-in-breed’ active and passive components, opening up new avenues for future high-speed, energy-efficient and cost-effective optical communication networks. Low-loss, high-speed and efficient optical modulators on a silicon platform are demonstrated.

High-performance hybrid silicon and lithium niobate Mach–Zehnder modulators for 100 Gbit s −1 and beyond

Optical modulators are at the heart of optical communication links Ideally, they should feature low insertion loss, low drive voltage, large modulation bandwidth, high linearity, compact footprint and low manufacturing cost Unfortunately, these criteria have only been achieved on separate occasionsBased on a Silicon and Lithium Niobate hybrid integration platform, we demonstrate Mach-Zehnder modulators that simultaneously fulfill these criteria The presented device exhibits an insertion loss of 25 dB, voltage-length product of 22 Vcm, high linearity, electro-optic bandwidth of at least 70 GHz and modulation rates up to 112 Gbit/s The high-performance modulator is realized by seamless integration of high-contrast waveguide based on Lithium Niobate - the most mature modulator material - with compact, low-loss silicon circuits The hybrid platform demonstrated here allows for the combination of 'best-in-breed' active and passive components, opening up new avenues for enabling future high-speed, energy efficient and cost-effective optical communication networks

High-Performance Hybrid Silicon and Lithium Niobate Mach-Zehnder Modulators for 100 Gbit/s and Beyond

Research on two-dimensional designer optical structures, or metasurfaces, has mainly focused on controlling the wavefronts of light propagating in free space. Here, we show that gradient metasurface structures consisting of phased arrays of plasmonic or dielectric nanoantennas can be used to control guided waves via strong optical scattering at subwavelength intervals. Based on this design principle, we experimentally demonstrate waveguide mode converters, polarization rotators and waveguide devices supporting asymmetric optical power transmission. We also demonstrate all-dielectric on-chip polarization rotators based on phased arrays of Mie resonators with negligible insertion losses. Our gradient metasurfaces can enable small-footprint, broadband and low-loss photonic integrated devices.

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Controlling propagation and coupling of waveguide modes using phase-gradient metasurfaces.

Many breakthroughs in the laboratories often do not bridge the gap between research and commercialization. However, silicon photonics bucked the trend, with industry observers estimating the commercial market to close in on a billion dollars in 2020 [45] . Silicon photonics leverages the billions of dollars and decades of research poured into silicon semiconductor device processing to enable high yield, robust processing, and most of all, low cost. Silicon is also a good optical material, with transparency in the commercially important infrared wavelength bands, and is a suitable platform for large-scale photonic integrated circuits. Silicon photonics is therefore slated to address the world's ever-increasing needs for bandwidth. It is part of an emerging ecosystem which includes designers, foundries, and integrators. In this paper, we review most of the foundries that presently enable silicon photonics integrated circuits fabrication. Some of these are pilot lines of major research institutes, and others are fully commercial pure-play foundries. Since silicon photonics has been commercially active for some years, foundries have released process design kits (PDK) that contain a standard device library. These libraries represent optimized and well-tested photonic elements, whose performance reflects the stability and maturity of the integration platforms. We will document the early works in silicon photonics, as well as its commercial status. We will provide a comprehensive review of the development of silicon photonics and the foundry services which enable the productization, including various efforts to develop and release PDK devices. In this context, we will report the long-standing efforts and contributions that previously IME/A*STAR and now AMF has dedicated to accelerating this journey.

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Review of Silicon Photonics Technology and Platform Development

Lithium niobate (LN), an outstanding and versatile material, has influenced our daily life for decades: from enabling high-speed optical communications that form the backbone of the Internet to realizing radio-frequency filtering used in our cell phones. This half-century-old material is currently embracing a revolution in thin-film LN integrated photonics. The success of manufacturing wafer-scale, high-quality, thin films of LN on insulator (LNOI), accompanied with breakthroughs in nanofabrication techniques, have made high-performance integrated nanophotonic components possible. With rapid development in the past few years, some of these thin-film LN devices, such as optical modulators and nonlinear wavelength converters, have already outperformed their legacy counterparts realized in bulk LN crystals. Furthermore, the nanophotonic integration enabled ultra-low-loss resonators in LN, which unlocked many novel applications such as optical frequency combs and quantum transducers. In this Review, we cover -- from basic principles to the state of the art -- the diverse aspects of integrated thin-film LN photonics, including the materials, basic passive components, and various active devices based on electro-optics, all-optical nonlinearities, and acousto-optics. We also identify challenges that this platform is currently facing and point out future opportunities. The field of integrated LNOI photonics is advancing rapidly and poised to make critical impacts on a broad range of applications in communication, signal processing, and quantum information.

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Integrated photonics on thin-film lithium niobate

In this paper, a substrate removing technique in a silicon Mach–Zehnder modulator (MZM) is proposed and demonstrated to improve modulation bandwidth Based on the novel and optimized traveling wave electrodes, the electrode transmission loss is reduced, and the electro-optical group index and 50  Ω impedance matching are improved, simultaneously A 2 mm long substrate removed silicon MZM with the measured and extrapolated 3 dB electro-optical bandwidth of >50  GHz and 60 GHz at the −8  V bias voltage is designed and fabricated Open optical eye diagrams of up to 90  GBaud/s NRZ and 56  GBaud/s four-level pulse amplitude modulation (PAM-4) are experimentally obtained without additional optical or digital compensations Based on this silicon MZM, the performance in a short-reach transmission system is further investigated Single-lane 112  Gb/s and 128  Gb/s transmissions over different distances of 1 km, 2 km, and 10 km are experimentally achieved based on this high-speed silicon MZM

Silicon intensity Mach–Zehnder modulator for single lane 100 Gb/s applications

We propose large bandwidth and high fabrication-tolerance mode-order converters on the silicon-on-insulator platform based on novel compact tapers structures. Each of the converters is in a single waveguide. Designs of different symmetries with and without breaking the parities between odd and even modes are illustrated. The fabrication tolerances of the devices are also investigated. The simulation results show that high conversion efficiencies can be readily achieved over a wavelength range from 1520 nm to 1580 nm for all of the proposed devices. The average conversion efficiencies of TE1-to-TE0, TE2-to-TE0, TE3-to-TE0, TE2-to-TE1, TE3-to-TE1, and TE3-to-TE2 converters are −0.061 dB, −0.052 dB, −0.11 dB, −0.119 dB, −0.168 dB, and −0.154 dB, respectively. The conversion efficiencies have negligible degradations under normal width and thickness deviations.

Low-loss and fabrication tolerant silicon mode-order converters based on novel compact tapers.

We present the design and experimental demonstration of the ultra-high-Q-factor silicon microring resonator based on a multi-mode ridge waveguide. The multi-mode ridge waveguide is designed to decrease the propagation loss and to improve the Q factor. The ultra-high Q factor of 1.1×106 is experimentally demonstrated, with the free spectrum range of 0.208 nm. The single-mode ridge waveguide is used in the coupling region to reduce the dimension of the microring resonator, and the bend radius is only 20 μm. To precisely control the resonance wavelength, a small heater is implemented on the silicon microring resonator with the tuning efficiency of 7.1  pm/mW. The degenerate four-wave mixing of the silicon microring resonator is investigated, and the conversion efficiency is measured to be −15.5  dB without optimizing the dispersion of the microring resonator and carriers extraction.

Design and demonstration of ultra-high-Q silicon microring resonator based on a multi-mode ridge waveguide

We design and demonstrate the novel silicon optical polarization rotators (PRs) based on the TM(0)-TE(n)-TE(0) mode conversions inside the waveguide. The TM(0)-TE(n) mode converters are realized by the mode hybridization of the tapered rib waveguides. The TE(n)-TE(0) mode converters based on the beam shaping method are followed to complete the PRs function. By using the TE(1), TE(2), and TE(3) mode as the transitional mode, the fabricated PRs show the insert losses of less than 0.4, 0.5, and 1 dB, respectively. The corresponding polarization extinction ratios of larger than 21, 18, and 23 dB, over a wavelength range of 100 nm.

Highly efficient silicon optical polarization rotators based on mode order conversions.

We demonstrate the optical transmission of an 800 Gbit/s (4×200  Gbit/s) pulse amplitude modulation-4 (PAM-4) signal and a 480 Gbit/s (4×120  Gbit/s) on–off-keying (OOK) signal by using a high-bandwidth (BW) silicon photonic (SiP) transmitter with the aid of digital signal processing (DSP). In this transmitter, a four-channel SiP modulator chip is co-packaged with a four-channel driver chip, with a measured 3 dB BW of 40 GHz. DSP is applied in both the transmitter and receiver sides for pre-/post-compensation and bit error rate (BER) calculation. Back-to-back (B2B) BERs of the PAM-4 signal and OOK signal are first measured for each channel of the transmitter with respect to a variety of data rates. Similar BER performance of four channels shows good uniformity of the transmitter between different channels. The BER penalty of the PAM-4 and OOK signals for 500 m and 1 km standard single-mode fiber (SSMF) transmission is then experimentally tested by using one channel of the transmitter. For a 200 Gbit/s PAM-4 signal, the BER is below the hard-decision forward error correction (HD-FEC) threshold for B2B and below the soft-decision FEC (SD-FEC) threshold after 1 km transmission. For a 120 Gbit/s OOK signal, the BER is below SD-FEC threshold for B2B. After 500 m and 1 km transmission, the data rate of the OOK signal shrinks to 119 Gbit/s and 118 Gbit/s with the SD-FEC threshold, respectively. Finally, the 800 Gbit/s PAM-4 signal with 1 km transmission is achieved with the BER of all four channels below the SD-FEC threshold.

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Lei Wang

Papers

Silicon intensity Mach–Zehnder modulator for single lane 100 Gb/s applications

Low-loss and fabrication tolerant silicon mode-order converters based on novel compact tapers.

Design and demonstration of ultra-high-Q silicon microring resonator based on a multi-mode ridge waveguide

Highly efficient silicon optical polarization rotators based on mode order conversions.

800 Gbit/s transmission over 1 km single-mode fiber using a four-channel silicon photonic transmitter