Microelectromechanical-system (MEMS)-based semiconductor gas sensors are considered one of the fastest-growing, interdisciplinary high technologies during the post-Moore era. Modern advancements within this arena include wearable electronics, Internet of Things, and artificial brain-inspired intelligence, among other modalities, thus bringing opportunities to drive MEMS-based gas sensors with higher performance, lower costs, and wider applicability. However, the high demand for miniature and micropower sensors with unified processes on a single chip imposes great challenges. This review focuses on recent developments and pitfalls in MEMS-based micro- and nanoscale gas sensors and details future trends. We also cover the background of the topic, seminal efforts, current applications and challenges, and opportunities for next-generation systems.

Challenges and Opportunities of Chemiresistors Based on Microelectromechanical Systems for Chemical Olfaction.

This paper presents a novel 3D micropellistor based on a 3D microheater. The 3D microheater with a Pt heater embedded in a concave-shaped active area was fabricated by MEMS technology. Then a detector and a compensator was developed by sol-gel process, introducing Pd as the catalytic metal and porous alumna as the reference material. Test results indicate that the 3D catalytic micropellistor has a output voltage of 12 mV to 10% LEL methane. And it has a very high sensitivity, fast response time and liner output voltages.

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Lei Xu

Papers

5.2.3 Design and Fabrication of a Novel 3D Micropellistor

Design and Fabrication of a Novel 3D Micropellistor