Liu Zhiying

TL;DR: The performance of the numerical orthogonal transformation method is discussed, demonstrated and verified, indicating that the presented method is valid, accurate and easily implemented for wavefront estimation from its slopes.

TL;DR: In this paper, an off-axis phase waveband plate-based interference microscopic detection apparatus including a 13.5nm extreme ultraviolet light source, a focusing waveband, a five-dimensional precision micro adjustment table, an offaxis waveband device, an optical fiber point diffraction device, and an extreme ultraviolet bright field CCD was presented.

TL;DR: In this paper, an apparatus for detecting the phase type defect of an extreme ultraviolet mask based on the polarization changes of scattered light is arranged; a surface type information database is built by using a finite difference time-domain method; an elliptic polarization scattering measurement method is employed for acquiring information about polarization scrambling changes; a weighed least square regression method is used for processing polarization scrambling information introduced into the database; so the contour information of the defect is eventually obtained.

TL;DR: In this article, a fully automatic ointment machine based on heavy viscous coating formation is presented, where a conveying mechanism, a medicine filling mechanism and a die pressing forming mechanism are organically combined; a photoelectric sensor and a pressure sensor are used as the auxiliary measures to realize the precise positioning and quantification.

TL;DR: In this paper, a light path structure of a space structure type sun simulator is described, which consists of a xenon lamp, an ellipsoid condenser, a first plane reflecting mirror, a space turning mirror, an optical integrator field lens, a front focal plane of a collimating mirror, and an off-axis parabolic mirror.